Inficon BCG450 ATM to Ultra-High Vacuum Triple Gauge Bedienungsanleitung

Operating Manual tina40e1-b (2011-04) 1 TripleGauge™ Bayard-Alpert Pirani Capacitance Diaphragm Gauge BCG450 BCG450-SD BCG450-SP

10 tina40e1-b (2011-04) Switching functions BCG450 BCG450-SD, -SP Adjustment range → Atmosphere switching function 2 (setpoints A and B) 1×10-

tina40e1-b (2011-04) 11 Fieldbus name Profibus Standard applied →  [7] Communication protocol data format →  [9], [7] Interface, physical

12 tina40e1-b (2011-04) DN 25 ISO-KF4-40UNC 2BDN 40 CF-R4-40UNC 2B Gauges with DeviceNet connector are 14 mm longer. 353-550, 353-55

tina40e1-b (2011-04) 13 3 Installation DANGERDANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm cau

14 tina40e1-b (2011-04)  Remove the protective lid. The protective lid will be needed for maintenance..  Make the flange connection t

tina40e1-b (2011-04) 15 • Allen key, AF 2.5  Unscrew the hexagon socket set screw (1) on the side of the electronics unit (2). 12  Rem

16 tina40e1-b (2011-04) In severely contaminating processes and to protect measurement electrodes opti-cally against light and fast charged par

tina40e1-b (2011-04) 17  Using a pin, press the baffle down in the center until it catches. Carefully remove the baffle with the screwdri

18 tina40e1-b (2011-04)  Plug the sensor connector into the gauge and secure it with the locking screws.  Connect the other end of the senso

tina40e1-b (2011-04) 19 TxDRxDDegas42 kΩ1314782125151.25 AT24VDegasIdent.RS23210---+-1489115D-Sub,15-pin,female,soldering sideCommon (power GN

2 tina40e1-b (2011-04) In all communications with INFICON, please specify the information on the product nameplate. For convenient reference co

20 tina40e1-b (2011-04) SP ASP BSP A 2) SP B 2)Degas42 kΩ36149111314782125151.25 AT24VDegasIdent.10---1)( )+-Measuringsignal-89115D-Sub,15-p

tina40e1-b (2011-04) 21 For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the out-put signal can be measured directly between th

22 tina40e1-b (2011-04)  Plug the DeviceNet (and sensor) cable connector into the gauge. Sensor cableDeviceNet cable  Lock the DeviceNet (and

tina40e1-b (2011-04) 23  Plug the Profibus (and sensor) cable connector into the gauge. Sensor cableProfibus cable  Lock the Profibus (and s

24 tina40e1-b (2011-04) 131481552354678NPELDCACGND+24 VPEBCG450D-Sub, 15-pinRS232CD-Sub, 9-pinMains90 ... 250 VAC50 ... 60 Hz  Connect the p

tina40e1-b (2011-04) 25 4 Operation The BCG450 vacuum gauges consist of three separate measuring systems (hot cathode Bayard-Alpert (BA) Pira

26 tina40e1-b (2011-04) VbPirani sensor The bridge voltage Vm is a measure for the gas pressure and is further processed electronically (linear

tina40e1-b (2011-04) 27 Due to the capacitance diaphragm sensor used in the upper pressure range, a minimized gas type dependence is achieved.

28 tina40e1-b (2011-04) When the operating voltage is supplied (→ Technical Data), the output signal is available between Pin 2 (+) and Pin 12

tina40e1-b (2011-04) 29 The emission control mode function defines the rules by which the emission of the gauge is switched on and off. Th

tina40e1-b (2011-04) 3 Due to the combination of three sensor technologies incorporated in the gauge (Capacitance diaphragm sensor, Pirani sen

30 tina40e1-b (2011-04) The Atmosphere Switching Function is used to define an atmospheric pressure threshold where a (semiconductor) relay

tina40e1-b (2011-04) 31 The following diagram shows the functional principle using example values (italic = example values): 833 mbar816 mbar

32 tina40e1-b (2011-04) The signal: atmospheric pressure reached is made available via a floating n. o. contact of a photo MOS relay contact at

tina40e1-b (2011-04) 33 No error (green background illumination) Pirani sensor error (red background illumination) BA sensor err

34 tina40e1-b (2011-04) The interface works in duplex mode. A nine byte string is sent continuously without a request approx. every 20 ms. Comm

tina40e1-b (2011-04) 35 Bit 1 Bit 0 Definition 0 0 emission off 0 1 emission 25 μA 1 0 emission 5 mA 1 1 degas Bit 2 Definit

36 tina40e1-b (2011-04) The example is based on the following output string: Byte No. 0 1 2 3 4 5 6 7 8 Value 7 5 0 0 242 48 20 13 69 The in

tina40e1-b (2011-04) 37 For commands to the gauge, six defined strings are used: Byte No. Command: 0 1 2 3 4 2) Set the unit mbar on the dis

38 tina40e1-b (2011-04) This interface allows operation of BCG450-SD with part number 353-557, 353-558 and 353-562 in connection with other dev

tina40e1-b (2011-04) 39 The admissible data rate depends on a number of factors such as system pa-rameters and cable length →  [4], [6]). It

4 tina40e1-b (2011-04) Contents Product Identification 2 Validity 2 Intended Use 2 Functional Principle 3 Trademarks 3 1 Safety 6 1.1 S

40 tina40e1-b (2011-04) This interface allows operation of BCG450-SP with part number 353-554 and 353-556 in connection with other devices that

tina40e1-b (2011-04) 41 The gauges BCG450-SD and BCG450-SP have two independent, manually setta-ble switching functions. Each switching functi

42 tina40e1-b (2011-04) The procedure for setting thresholds is identical for both switching functions.  Put the gauge into operation.  Con

tina40e1-b (2011-04) 43 5 Deinstallation DANGERDANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Bef

44 tina40e1-b (2011-04)  Remove gauge from the vacuum system and replace the protective lid.

tina40e1-b (2011-04) 45 6 Maintenance, Repair DANGERDANGER: contaminated parts Contaminated parts can be detrimental to health and environmen

46 tina40e1-b (2011-04)  Two 5 byte long command strings have to be sent to the gauge in succes-sion (general RS232 information →  33): Stri

tina40e1-b (2011-04) 47 In the event of a fault or a complete failure of the output signal, the gauge can eas-ily be checked. • Voltmeter /

48 tina40e1-b (2011-04) If the cause of a fault is suspected to be in the sensor, the following checks can be made with an ohmmeter (the vacuum

tina40e1-b (2011-04) 49 Replacement is necessary, when • the sensor is severely contaminated • the sensor is mechanically deformed • the se

tina40e1-b (2011-04) 5 6 Maintenance, Repair 45 6.1 Maintenance 45 6.1.1 Cleaning the Gauge 45 6.2 Adjusting the Gauge 45 6.3 Adjusting

50 tina40e1-b (2011-04) 7 Options Part number 24 VDC power supply / RS232C line (→  23) 353-511 Baffle DN 25 ISO-KF / DN 40 CF-R (→  16) 353

tina40e1-b (2011-04) 51 10 Returning the Product WARNINGWARNING: forwarding contaminated products Contaminated products (e.g. radioactive, to

52 tina40e1-b (2011-04) Appendix p = 10(U - 7.75) / 0.75 + c U = 0.75 × (log p - c) + 7.75 where U p c [V] [mbar] 0 [V] [Pa] 2 [V] [T

tina40e1-b (2011-04) 53 Pressure indicated (gauge adjusted for air) 10286421018642100864210–1864210–2864210–310–424610–324610–2246 2461002

54 tina40e1-b (2011-04) The gas type dependence in the pressure range 10-2 … 1 mbar (Pirani sensor range) can be compensated by means of the fo

tina40e1-b (2011-04) BCG450 v1.om 55  [1] www.inficon.com Communication Protocol DeviceNet™ BCG450-SD tira40e1 INFICON AG, LI–9496 Balze

56 tina40e1-b (1104) BCG450 v1.om Declaration of Contamination The service, repair, and/or disposal of vacuum equipment and components will

tina40e1-b (2011-04) BCG450 v1.om 57 Notes

58 tina40e1-b (2011-04) BCG450 v1.om Notes

tina40e1-b (2011-04) BCG450 v1.om 59 Notes

6 tina40e1-b (2011-04) 1 Safety DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equ

LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 Original: German tina40d1-b (2011-04) [email protected] t i na40e1-

tina40e1-b (2011-04) 7 • Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possibl

8 tina40e1-b (2011-04) 2 Technical Data Pressure range 10 … 1500 mbar capacitance diaphragm sensor 1 … 10 mbar crossover ran

tina40e1-b (2011-04) 9 Display panel Background illumination Dimensions Pressure units (pressure p) LCD matrix, 32×16 pixels two colors red/gr