Inficon Gemini ATM to Ultra-High Vacuum Gauge Bedienungsanleitung

tina83e1-a (2014-02) 1 Cold Cathode Gauge Gemini MAG500, MAG504 Cold Cathode Pirani Gauge Gemini MPG500, MPG504 Operating Manual Incl. EC De

10 tina83e1-a (2014-02) 2 Technical Data Measurement range (air, N2) MAG MPG 1×10-9 … 1×10-2 mbar 1×10-9 … 1000 mbar Accuracy MAG (N2) 1×10-8

tina83e1-a (2014-02) 11 Gauge identification 3MAx-xxx-0x0N 3MAx-xxx-0x0Q 3MBx-xxx-0x0P – 100 kΩ referenced to supply common 85 kΩ referenced

12 tina83e1-a (2014-02) Fuse to be connected 1) ≤1 AT High voltage in the measuring chamber Ignition voltage Operating voltage ≤4.5 kV ≤3.3 kV

tina83e1-a (2014-02) 13 Materials exposed to vacuum Vacuum connection Measuring chamber stainless steel (1.4435) stainless steel (1.4435) Pira

14 tina83e1-a (2014-02) Weight DN 25 ISO-KF DN 40 ISO-KF DN 40 CF-F und CF-R <280 g <320 g <570 g Dimensions [mm] DN 25 ISO-KF1579 6

tina83e1-a (2014-02) 15 2.1 Measuring Signal vs. Pressure Measurement range 1.5 … 8.5 V (3MAx-xxx-0x0N) 1E–011E+001E–061E–071E–081E–091E–100

16 tina83e1-a (2014-02) Measurement range 0.667 … 10 V (3MAx-xxx-0x0Q) 1E–011E+001E–061E–071E–081E–091E–100.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.

tina83e1-a (2014-02) 17 Measurement range 1.398 … 8.6 V (3MBx-xxx-0x0P) 1E+041E+021E+001E–021E–041E–061E–080.0 0.5 2.5 3.5 4.5 5.56.57.5 8.5 9.

18 tina83e1-a (2014-02) 2.2 Gas Type Dependence MAG50x Indicated pressure (gauge calibrated for air) 4210–3864210–4864210–5864210–6864210–710–7

tina83e1-a (2014-02) 19 where: Gas type K Air (N2, O2, CO) 1.0 Xe 0.4 Kr 0.5 Ar 0.8 H2 2.4 Ne 4.1 He 5.9 These conversion factors

2 tina83e1-a (2014-02) Product Identification In all communications with INFICON, please specify the infor-mation given on the product nameplat

20 tina83e1-a (2014-02) 2.3 Gas Type Dependence MPG50x Indication range from 102 … 10-2 mbar (Pirani-only operation) Indicated pressure (gaug

tina83e1-a (2014-02) 21 Indication range 10-6 … 0.1 mbar Indicated pressure (gauge calibrated for air) 64264264210–4864210–624610–510–410–5864

22 tina83e1-a (2014-02) where: Gas type K Air (N2, O2, CO) 1.0 Xe 0.4 Kr 0.5 Ar 0.8 H2 2.4 Ne 4.1 He 5.9 These conversion factors a

tina83e1-a (2014-02) 23 3 Installation 3.1 Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by re

24 tina83e1-a (2014-02) DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the e

tina83e1-a (2014-02) 25 For potentially contaminating applications and to protect the measurement system against contamination, installation of

26 tina83e1-a (2014-02) When making a CF flange connection, it may be ad-vantageous to temporarily remove the electronics unit. Hexagon socket

tina83e1-a (2014-02) 27 3.2 Power Connection Make sure the vacuum connection is properly made (→  23). DANGER The gauge may only be conne

28 tina83e1-a (2014-02) 3.2.1 FCC 68, 8-pin Connector If no sensor cable is available, make one according to the following diagram. Connect th

tina83e1-a (2014-02) 29 3.2.2 D-Sub, 9-pin Connector If no sensor cable is available, make one according to the following diagram. Connect the

tina83e1-a (2014-02) 3 Validity This document applies to products of the MAG50x and MPG50x series: 3Mxx-xxx-0x0xCollector currentFlange0  St

30 tina83e1-a (2014-02) 4 Operation 4.1 Status Indication MAG DIAADJCALHV-STSTECA02468Supply voltageErrorHigh voltagecold cathodeFor factory

tina83e1-a (2014-02) 31 4.2 Status Indication MPG DIAADJCALHV-STSTECA02468Supply voltageErrorHigh voltagecold cathodeFor factorysetting onlyC

32 tina83e1-a (2014-02) 4.3 Put MAG50x Into Operation Caution Turn on the gauge/high voltage only at pressures <10-2 mbar to prevent exces

tina83e1-a (2014-02) 33 The optimum measuring configuration for the particular pressure range, in which measurement is performed, is used: 10-3

34 tina83e1-a (2014-02) MPG50x only As long as the cold cathode measuring circuit has not ignited, the measuring value of the Pirani is output a

tina83e1-a (2014-02) 35 Contamination can to a certain extent be reduced by: • geometric protection (e.g. screenings, elbows) against parti-cle

36 tina83e1-a (2014-02) 5 Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Be

tina83e1-a (2014-02) 37  Remove gauge from the vacuum system and install the protective lid. When deinstalling the CF flange connection, it

38 tina83e1-a (2014-02) 6 Maintenance, Repair Gauge failures due to contamination and wear and tear, as well as expendable parts (e.g. ioniza

tina83e1-a (2014-02) 39 For adjusting the zero, operate the gauge under the same con-stant ambient conditions and in the same mounting orientati

4 tina83e1-a (2014-02) Intended Use Gemini MAG500, MAG504 The Cold Cathode Gauges Gemini MAG500 and MAG504 have been designed for vacuum meas

40 tina83e1-a (2014-02)  Press the <ADJ> button with a pin and the HV adjustment is carried out (duration ≈5 s). If the pressure value

tina83e1-a (2014-02) 41 Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rat

42 tina83e1-a (2014-02) 21354  Unfasten the hexagon socket set screw (4) and remove the complete measuring chamber (3) from the electronics un

tina83e1-a (2014-02) 43  Using an ohmmeter, make following measurements on the contact pins. Measurement between pins Possible cause 1 + 4

44 tina83e1-a (2014-02)  We recommend to rub the inside walls of the measuring chamber up to the groove for the retaining ring to a bright fini

tina83e1-a (2014-02) 45  Carefully slide the measuring chamber cpl. (3) (clean or new) into the electronics unit (5) until the mechanical stop

46 tina83e1-a (2014-02)  Set the calibration value of the spare sensor with the <CAL> switch on the electronics unit (5). DIAADJCALHV-ST

tina83e1-a (2014-02) 47  Fasten the measuring chamber (3) by means of the hexagon socket set screw (4).  MPG50x gauge only: Perform an ATM a

48 tina83e1-a (2014-02) 6.3 Troubleshooting In case of an error, it may be helpful to just turn off the mains supply and turn it on again aft

tina83e1-a (2014-02) 49 Correction Turn on power supply. Replace ionization cham-ber or measuring cham-ber cpl.(→  43, 45). Switch on the hi

tina83e1-a (2014-02) 5 Over the whole measurement range, the measuring signal is output as a logarithm of the pressure. Scope of Delivery 1

50 tina83e1-a (2014-02) Correction Turn on power supply. Replace ionization cham-ber or measuring cham-ber cpl (→  43, 45). Wait, until the g

tina83e1-a (2014-02) 51 7 Returning the Product WARNING WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, t

52 tina83e1-a (2014-02) 8 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before b

tina83e1-a (2014-02) 53 9 Options Ordering No. Seal with centering ring and fine filter, DN 25 ISO-KF (stainless steel) 211-098 10 Acc

54 tina83e1-a (2014-02) 11.2 Ionization Chamber for MAG50x and MPG50x Ordering No. Ionization chamber (stainless steel) 351-555 11.3 Mea

tina83e1-a (2014-02) 55 11.3.2 Measuring Chamber Cpl. for MAG504 Ionization chamber made of stainless steel, Al2O3 coated Ordering No. 3MA3-0

56 tina83e1-a (2014-02) EC Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions

tina83e1-a (2014-02) 57 Notes

58 tina83e1-a (2014-02) Notes

tina83e1-a (2014-02) 59 Notes

6 tina83e1-a (2014-02) Contents Product Identification 2 Validity 3 Intended Use 4 Functional Principle 4 Scope of Delivery 5 1 Safety 8

LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 Original: German tina83d1-a (2014-02) [email protected] t i na83e1-

tina83e1-a (2014-02) 7 6.3 Troubleshooting 48 7 Returning the Product 51 8 Disposal 52 9 Options 53 10 Accessories 53 11 Spare Parts 53

8 tina83e1-a (2014-02) 1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on prevent

tina83e1-a (2014-02) 9 1.3 General Safety Instructions • Adhere to the applicable regulations and take the necessary precautions for the proce