Inficon SQM-242 Thin Film Deposition Controller Card Opera Handbücher

Bedienungsanleitungen und Benutzerhandbücher für Ausrüstung Inficon SQM-242 Thin Film Deposition Controller Card Opera.
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Inhaltsverzeichnis

OPERATING MANUAL

1

Trademarks

4

Disclaimer

4

Copyright

4

Warranty

7

Table Of Contents

9

SQM-242 Operating Manual

10

Chapter 8

11

Calibration

11

Chapter 9

11

Appendix A

12

Material Table

12

TOC - 4

12

1.1 Introduction

13

1.1.1 Related Manuals

14

1.2 Instrument Safety

15

1.4 Specifications

18

1.4.1 SQM-242 Measurement

18

1.4.2 SAM-242 Inputs

18

1.4.4 Setup Parameters

18

1.4.6 Computer Requirements

19

1.4.7 General Specifications

19

1.5 Unpacking and Inspection

21

1.6.1 Base Configurations

21

1.6.2 Accessories

21

1.6.3 Sensors

22

JP5 JP5 JP5 JP5 JP5 JP5

23

2.3 Software Installation

24

Figure 2-3 SQM-242 Setup

25

26

Figure 2-5 SAM-242 Card

27

2.6 Digital I/O

28

3.1 Introduction

29

3.2 Main Dialog Box

29

3.3 Edit: Auto/Manual Mode

31

3.4 Edit: Recorder Mode

33

3.5 File Menu

34

3.6 View Menu

34

3.6.1 View Menu: Readings

34

Over 100%

36

Under 100%

36

Figure 3-7 Sensor Setup

37

3.6.3 View Menu: Card Setup

38

3 - 11

39

3 - 12

40

4.1 Introduction

41

5.1 Introduction

43

5.2 Operation

44

Chapter 6

47

Communications

47

6.2 DLL Functions

48

6.3 Sample Files

52

7.1 Troubleshooting Guide

55

7.2 Replacing the Crystal

64

7.2.1 Front Load

64

7.2.2 Cool Drawer

65

7 - 12

66

7.2.3 Bakeable Sensor

67

7.2.4 Sputtering Sensor

68

7.2.5 Crystal Snatcher

69

7.3 Crystal Sensor Emulator

70

IPN 760-601-G2

70

7.3.1 Diagnostic Procedures

71

7 - 19

73

7 - 20

74

7 - 21

75

7 - 22

76

8.2 Determining Density

77

8.3 Determining Tooling

78

8.5 Tuning the Control Loop

80

Figure 8-1 Proportional Gain

81

Figure 8-2 Time Constant

81

8.5.1 Fast Source

82

8.5.2 Slow Source

83

8.5.3 Loop Tuning Procedure

84

8 - 10

86

9.1.1 Monitor Crystals

88

Frequency (in MHz)

89

9.1.3 Z-match Technique

91

9.1.4 Active Oscillator

92

9.1.5 Control Loop Theory

94

[controller] [process]

96

9 - 12

98

A.1 Introduction

99

IPN 074-549-P1A

100

SQM-242 Operating Manual

101

A - 10

108





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