Inficon STC-2000A Thin Film Deposition Controller Operatin Handbücher

Bedienungsanleitungen und Benutzerhandbücher für Ausrüstung Inficon STC-2000A Thin Film Deposition Controller Operatin.
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Inhaltsverzeichnis

USERS MANUAL 518-031

1

Phone (315) 463-5297

3

Fax (315) 463-5298

3

Introduction

4

MANUAL DESCRIPTION

5

TABLE OF CONTENTS

7

FIGURES

11

STC-2000A Spare Parts

13

Optional Sensor Parts

13

Sensor card=0.216 lbs.

15

Programmable Parameter Lists

16

Password Dependencies:

20

Sensor Specifications

21

Electrical

22

Materials

22

(in VAC)

22

SECTION 2.0

23

SECTION 2.1

24

SECTION 2.2

28

 page 29 of 292 

29

Purge Valve

30

Rough Valve

30

OSC-100A OSCILLATOR

34

Water Cooling

35

Microdot Coaxial Connector

35

#4-40 Tap -- 4 holes

35

Equally Spaced

35

[(-) Input Pins]

37

[(+) Input Pins]

37

to alter the tooling of both

41

(where x = 1 to 4)

44

(used w/ installed

44

(Process 1 will be reviewed)

44

I/O programming Introduction

46

Front Panel Leds >

49

Front Panel Keys >

49

Overview

53

STC-2000A

54

 page 59 of 292 

59

Press here to

60

RESET/START PROC

61

Menu Tree

62

Main Menu Description

66

Process selection is not

67

Films and Processes

69

Film Edit/Review Mode

69

SELECTING THE ACTIVE FILM

75

Parameter SOAK 1 PWR VALUE

76

Review or Edit Processes

88

Editing Processes

88

+"

91

Set Active Process

98

Non-Sequencing Differences

99

(XTAL) SAMPLE QUAL 1-50%

103

 page 104 of 292 

104

INC DEC

105

105

System Configuration

109

Detailed

113

Hardware Requirements

116

[dropped Xtal ch Failure]

118

Process Accounting

119

starting group

120

SECTION 3.19

121

[ bus-hold interrupt ])

121

FACTORY RESTORE

123

. These 2 number codes

127

Programming Example

129

[Note: pressing the GO2PRC

130

PROC 1 : PROC BUSY

135

AYER 1

135

Product programming summary

137

Summary

137

Sensor Head Installation

142

DATA AQUISITION

142

COMPUTER

142

Memory Module

142

CHART RECORDER

142

Compression Fittings

143

Electrical In-Vacuum Cable

144

Line Power

145

CONNECTOR INSTALLATION

146

Connector Shielding

146

SECTION 4.5

146

Sensor Connections

146

SECTION 4.7

148

(+5 vdc.)

150

SECTION 4.12

155

Communications Options

155

I/O PROGRAMMING

156

Definition Of Common Terms

157

Boolean Operations

160

STC-2000A States and Events

161

Valid Functions - Type

162

Function Index

162

 page 163 of 292 

163

 page 164 of 292 

164

Steady State vs. Edges

166

Input Functions

166

Output Functions

167

Soft Nodes and Sync Events

167

Internal Operations

168

Operate Menu

169

Memory Menu

169

Editing an I/O Program

170

Programming Tree

172

To construct entry of

173

10 key twice and 1 key

173

[I81 #2 & O10]

174

I/O SETUP Edit Menu

175

Edit/Change Menu

176

I/O Functions

179

Arithmetic/Logical Functions

179

Example 2 - Power On Relay

185

with checksum ID=B41779

188

SECTION 5.16

191

(assumes

193

Layer number ID# 900-999

194

MANUAL POWER

195

I/O SETUP Menu Summary

196

 page 197 of 292 

197

Computer Interfacing

198

SECTION 6.1 Sycon Protocol

199

SECTION 6.2 ASCII Protocol

201

SECTION 6.6

202

Commands @ & ?

204

Reset Power Lost Status

205

Commands A & B

206

Commands C & D

215

Read RunTime Data Group 4

219

Command E

219

Commands F & G

226

Commands H & I

237

Command J

242

Command L

244

Address

245

Commands M,N & O

246

Commands P,Q,R,S

249

Commands W-Z, a-d

255

Commands e,f,g

259

Command h

260

Command I

260

Theory and Calibration

266

TOOLING > 100%

268

TOOLING < 100%

268

Material Reference Table

269

SYMPTOM CAUSE REMEDY

272

 page 273 of 292 

273

East Syracuse, NY

275

SECTION 8.3 FAQs

276

Section 9.0 Glossary

277

Section 10.0

279

Channel x

282

INDEX

287





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