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Inficon Guardian EIES Controller Handbücher

Bedienungsanleitungen und Benutzerhandbücher für Ausrüstung Inficon Guardian EIES Controller.
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Inficon Guardian EIES Controller Bedienungsanleitung (160 Seiten)


Marke: Inficon | Kategorie: Ausrüstung | Größe: 10.06 MB |

 

Inhaltsverzeichnis

Guardian

1

Trademarks

4

Disclaimer

4

Copyright

4

Warranty

7

Table Of Contents

9

TOC - 2

10

Chapter 3

10

EIES Software

10

TOC - 3

11

TOC - 4

12

Chapter 4

12

Installation

12

TOC - 5

13

Chapter 1

15

1.2 EIES Controller

16

1.3 EIES Sensor

16

1.4 EIES Detector

19

1.5 EIES Software

19

1.6 Quartz Crystal Monitor

20

1.7 Analog Measurements

20

1.8 Specifications

21

1.8.1 Sensor

21

1.8.2 Detector

22

1.8.3 Controller

22

1 - 10

24

2.1 Introduction

25

2.2 Installation

25

2.2.1 Sensor Installation

25

016-205-P2

26

Standard Rate Cover

26

016-205-P1

26

High Rate Cover

26

2.3 EIES Software

29

2.3.1 Software Installation

29

2.3.2 EIES Main Screen

30

Figure 2-4 Readings Display

31

2.3.3 Edit Film

32

2.3.4 Edit Processes

32

2 - 10

34

2.3.5 Edit Layer

35

2 - 12

36

Figure 2-11

37

2 - 14

38

2 - 15

39

Figure 2-13 Edit Process

39

2.3.6 Views

40

2.3.7 Software Summary

41

2.4 Initial Setup

42

2.4.1 Power-up Sequence

42

2.4.2 Communications

42

2.4.3 Detector Calibration

43

2.4.4 Sensor Setup

44

2.4.5 QCM Option

45

2.4.6 Digital I/O

46

2.5 Operation

46

2.5.2 Setup Layer Parameters

47

2 - 24

48

2.5.3 Start Deposition

49

2 - 26

50

2.5.4 Manual Calibration

51

2.5.5 QCM Calibration

51

2.5.6 Stop Deposition

51

2 - 28

52

3.1 Introduction

53

3.2 Installation

55

3.3 Main Screen

57

3.3.1 Status Panel

57

3.3.2 Control Panel

58

Figure 3-9 Ratio Mode

60

3 - 10

62

3.3.6 Menu

63

3.4 File Menu

63

3 - 12

64

3.4.7 File >> Exit

66

3.5 Edit Process

66

3 - 15

67

3.6 Edit Layer

68

3.6.1 Layer Grid

69

3.6.2 Rate Ramps Grid

70

3 - 19

71

3.6.4 Ratio Display Grid

72

3.6.5 Edit Layer Film Tab

73

3 - 22

74

3 - 23

75

3.6.6 Edit Layer Film Cal

76

3 - 25

77

3 - 26

78

3.7 Edit: Film

79

3.7.1 Deposit Grid

80

3.7.2 Condition Grid

80

3.7.3 Film Cal(ibration) Tab

80

3.8 Edit >> System

81

3.8.1 Channel Tab

81

3.8.2 Sensor Tab

82

3.8.3 QCM Tab

83

3 - 32

84

3.8.4 Digital I/O Tab

85

3 - 34

86

3.8.5 Comm Tab

87

3 - 36

88

3.8.6 Display Tab

89

3.9 View Menu

90

3.9.2 Graph Selection

90

3 - 39

91

Figure 3-31 View Setup

91

3 - 40

92

4.1 Introduction

93

4.2.1 Sensor Position

95

4.2.2 Sensor Covers

96

Small Cutout

97

Large Cutout

97

2.75 in. Flange

97

4.2.4 Sensor Filament Cables

98

4.3 Detector

99

4.3.1 Detector Cable(s)

99

IPN 074-517-P1D

100

4 - 11

103

Figure 4-11 Beam Splitter

103

4.4 Optical Filters

104

4.5.1 RS232 Serial Interface

105

4.5 Computer Connections

105

4 - 14

106

4 - 15

107

4 - 16

108

4.6 Controller Installation

109

4.6.2 Relay Connector Pinout

110

4.6.3 Input Connector Pinout

111

4.6.4 Sensor(s)

112

4.6.5 Control Outputs

113

4.6.6 Computer

113

4.6.7 Mains Power

114

4 - 23

115

4.8 Monochromator Option

116

4 - 25

117

4 - 26

118

Chapter 5

119

5.3 Sensor Maintenance

120

5.3.1 Sensor Cleaning

120

5.4 Chassis Cleaning

123

5.5 Troubleshooting

123

6.1 Introduction

125

6.2.1 Sensor

125

6.2.2 Optical Discrimination

127

6.2.3 Detector

128

6.3.1 Density

129

6.3.2 Z-Ratio or Z-Factor

129

6.3.3 Tooling Factor

131

6.4 EIES Calibration

132

6.4.1 Detector Calibration

132

6.4.2 PMT Voltage Selection

132

6.4.3 Zero Calibration

133

6.4.5 Gain Calibration - QCM

134

6.5 Loop Tuning

135

6 - 12

136

6 - 13

137

6 - 14

138

Chapter 7

139

Communications

139

35 User Units

143

38 Exponent

143

7.3.1 Serial Interface

146

7.3.2 Ethernet Interface

146

7 - 10

148

7 - 11

149

7 - 12

150

7 - 13

151

7 - 14

152

7 - 15

153

7 - 16

154

Appendix A

155

Material Optical Parameters

155

Appendix B

157

Material QCM Parameters

157

Index - 1

159

IPN 074-517-P1C

160




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