Inficon VGC403 Three-Channel Measurement and Control Unit Bedienungsanleitung

Operating ManualIncl. EC Declaration of Conformitytinb07e1-e 2011-07 1VGC402Two-Channel Measurement and Control UnitVGC403Three-Channel Measurement an

10 tinb07e1-e 2011-07 Vacuum Gauge Controller3 Installation3.1 Unpacking1 Visually inspect the transport packaging for signs of external damage2 Unpac

tinb07e1-e 2011-07 Vacuum Gauge Controller 11NOTE:In order to reduce the strain on the front panel it is recommended to support the bottom of the unit

12 tinb07e1-e 2011-07 Vacuum Gauge Controller3.3.2 Mains connectionThe mains connection (Fig. 3-4,  11, Pos. G) is designed for a mains cable which c

tinb07e1-e 2011-07 Vacuum Gauge Controller 13Connecting1 Channel 1: Connect the sensor with to the CH1-A or CH1-B connection. Use a shielded 1:1 cable

14 tinb07e1-e 2011-07 Vacuum Gauge Controller3.3.6 CONTROLThe CONTROL connection (Fig. 3-4,  11, Pos. D) con-tains the following signal pins:• Analog

tinb07e1-e 2011-07 Vacuum Gauge Controller 154Operation4.1 Front panelFig. 4-1,  15 shows the front panel of the VGC403. The VGC402 is not equipped w

16 tinb07e1-e 2011-07 Vacuum Gauge Controller4.2 Switching on and off4.2.1 Switching on1 Switch the mains switch on. See Fig. 3-4,  11, Pos. H.After

tinb07e1-e 2011-07 Vacuum Gauge Controller 174.4 Measurement mode4.4.1 SelectionThe Vacuum Gauge Controller automatically selects the measurement mode

18 tinb07e1-e 2011-07 Vacuum Gauge Controller4.4.3.4 Switching degas function onThe degas function of the following sensors can be switched on manuall

tinb07e1-e 2011-07 Vacuum Gauge Controller 194.5 Parameter mode4.5.1 SelectionPressing the PARA button switches from the measure-ment mode to the para

2 tinb07e1-e 2011-07 Vacuum Gauge ControllerContents1 Introduction1.1 Validity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41.1.1 Part

20 tinb07e1-e 2011-07 Vacuum Gauge Controller4.5.3 Basic operationStarting at the measurement menu, you can select and modify a specific parameter as

tinb07e1-e 2011-07 Vacuum Gauge Controller 215 Parameter5.1 Switching function parameters (PArA SP)This parameter group allows you to configure the sw

22 tinb07e1-e 2011-07 Vacuum Gauge Controller5.1.2 Configuring switching functionsPrerequisite: The parameter group SP-P is selected1 Press the PARA b

tinb07e1-e 2011-07 Vacuum Gauge Controller 235.2 Sensor parameters (PArA SEn)There is an individual set of sensor parameters for each channel. Select

24 tinb07e1-e 2011-07 Vacuum Gauge Controller5.2.2 Gas type (GAS)Sensors are normally calibrated for a measurement in nitrogen or in air. The GAS para

tinb07e1-e 2011-07 Vacuum Gauge Controller 25Adjusting the zero point of a digital CDG1 Select the oFS parameter2 Keep the DOWN button pressed for app

26 tinb07e1-e 2011-07 Vacuum Gauge Controlleroff when the pressure on channel 2 exceeds the switch-off threshold.CH 3By channel 3. This setting is onl

tinb07e1-e 2011-07 Vacuum Gauge Controller 275.3 General parameters (PArA GEn)These parameters are used for general configuration of the unit. The par

28 tinb07e1-e 2011-07 Vacuum Gauge ControllerLoGLogarithmic representation of the entire measuring range.LoG ALogarithmic representation of the entire

tinb07e1-e 2011-07 Vacuum Gauge Controller 29iM221Logarithmic representation of the IM221 controller (1 V/decade) U = 8 V is equivalent of p = 10-2 mb

tinb07e1-e 2011-07 Vacuum Gauge Controller 35.4.1 Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . 295.4.2 Firmware version (Pnr) . .

30 tinb07e1-e 2011-07 Vacuum Gauge ControllerTab. 5-12 dt-C parameter values 5.4.4 Torr lock (tr-L)This parameter affects the general parameter unit.

tinb07e1-e 2011-07 Vacuum Gauge Controller 315.4.11 A/D converter ID (Ad-i)For each channel, display a signal (in volts) which is caused by a resistor

32 tinb07e1-e 2011-07 Vacuum Gauge Controller6 Computer interface6.1 Basics6.1.1 ConnectionThe Vacuum Gauge Controller is able to communicate with a c

tinb07e1-e 2011-07 Vacuum Gauge Controller 33S: Mnemonic [parameters]<CR>[<LF>]R: <ACK><CR><LF> or <NAK><CR>

34 tinb07e1-e 2011-07 Vacuum Gauge Controller6.3 Mnemonics6.3.1 OverviewTab. 6-3 MnemonicsMnemonic SignificanceAOM Analog output mode. Characteristic

tinb07e1-e 2011-07 Vacuum Gauge Controller 356.3.2 AOMAnalog output mode. Characteristic curve of the recorder output. See Chapter 5.3.5 Recorder outp

36 tinb07e1-e 2011-07 Vacuum Gauge Controller6.3.5 CORCorrection factor. See Chapter 5.2.2 Gas type (GAS),  24.S: COR[,a.aa,b.bb,c.cc]<CR>[<

tinb07e1-e 2011-07 Vacuum Gauge Controller 37bined by the logical operator OR. Example: 1001 = Device error and syntax error.6.3.10 EUMSwitch the emmi

38 tinb07e1-e 2011-07 Vacuum Gauge Controller6.3.13 FUMSelect the filament. See Chapter 5.2.11 Filament selec-tion (FiL),  26.S: FUM[,a,b,c]<CR>

tinb07e1-e 2011-07 Vacuum Gauge Controller 39S: LOC[,a]<CR>[<LF>]R: <ACK><CR><LF>S: <ENQ>R: a<CR><LF>6

4 tinb07e1-e 2011-07 Vacuum Gauge Controller1 Introduction1.1 Validity1.1.1 Part numberThis document applies to the following products:The part number

40 tinb07e1-e 2011-07 Vacuum Gauge Controller6.3.22 PREPirani range extension. See Chapter 5.2.12 Pirani range extension (PrE),  26.S: PRE[,a,b,c]<

tinb07e1-e 2011-07 Vacuum Gauge Controller 41NOTE:Parameters which have been changed manually (control buttons) are saved in the EEPROM automat-ically

42 tinb07e1-e 2011-07 Vacuum Gauge Controller6.3.29 TADTest A/D converter. Test the A/D converter. See Chapter 5.4.10 A/D converter signal (Ad-S),  3

tinb07e1-e 2011-07 Vacuum Gauge Controller 436.3.33 TIDTransmitter identification. Sensor identification. See Chapter 4.4.3.7 Identifying a sensor, 

44 tinb07e1-e 2011-07 Vacuum Gauge Controller6.3.36 TLCTorr lock. See Chapter 5.4.4 Torr lock (tr-L),  30.S: TLC[,a]<CR>[<LF>]R: <ACK&

tinb07e1-e 2011-07 Vacuum Gauge Controller 457 Maintenance and service7.1 MaintenanceThe Vacuum Gauge Controller does not require any spe-cial mainten

46 tinb07e1-e 2011-07 Vacuum Gauge Controller7.3 Calibration7.3.1 BasicsThe Vacuum Gauge Controller can only measure with high accuracy when it is cal

tinb07e1-e 2011-07 Vacuum Gauge Controller 47The calibration offset of the respective channel is deter-mined and stored in the EEPROM.Calibration fact

48 tinb07e1-e 2011-07 Vacuum Gauge Controller8 Troubleshooting8.1 Fault indicationA fault in the Vacuum Gauge Controller is indicated as follows:• FAI

tinb07e1-e 2011-07 Vacuum Gauge Controller 499 Storage and disposal9.1 PackagingPlease keep the original packaging. The packaging is required for stor

tinb07e1-e 2011-07 Vacuum Gauge Controller 51.4 Safety1.4.1 Personnel qualificationsAll work described in this document may only be carried out by per

50 tinb07e1-e 2011-07 Vacuum Gauge ControllerAppendixConversion tablesWeightsPressureLinear measuresTemperature1 È = ...Æ kg lb oz slugkg 1 2.205 35.2

tinb07e1-e 2011-07 Vacuum Gauge Controller 51Default parametersLiteratureThe operating manuals listed below can be downloaded from the website www.inf

52 tinb07e1-e 2011-07 Vacuum Gauge Controller[14] Operating ManualInverted Magnetron Pirani GaugeMPG400, MPG401tina48e1INFICON AG, LI–9496 Balzers, Li

tinb07e1-e 2011-07 Vacuum Gauge Controller 53EEC Declaration of Conformity . . . . . . . . . . . . . . . . . . . 55EEPROM test . . . . . . . . . . . .

54 tinb07e1-e 2011-07 Vacuum Gauge ControllerFilament selection . . . . . . . . . . . . . . . . . . . . . . . . . 26Gas type. . . . . . . . . . . . .

tinb07e1-e 2011-07 Vacuum Gauge Controller 55ETL CertificationThe products VGC402 and VGC403 comply with the requirements of the following standards:U

+423 / 388 3111+423 / 388 3700LI-9496 BalzersLiechtensteinTelFaxreachus@inficon.comwww.inficon.comOriginal: tinb07d1-e (2011-07)t i nb07e1- e

6 tinb07e1-e 2011-07 Vacuum Gauge Controller1.4.4 Disconnecting deviceThe Vacuum Gauge Controller is equipped with a discon-necting device according t

tinb07e1-e 2011-07 Vacuum Gauge Controller 72 Technical data2.1 General data2.1.1 Mechanical dataFig. 2-1 Dimensions (in mm)2.1.2 Ambience2.1.3 Operat

8 tinb07e1-e 2011-07 Vacuum Gauge Controller2.3 Channels2.3.1 Sensor connections2.3.2 Sensor supply2.3.3 Measuring techniqueNOTE:The measurements of t

tinb07e1-e 2011-07 Vacuum Gauge Controller 92.4.1 Switching function relay2.4.2 Error signal relay2.5 Outputs2.5.1 Analog output2.5.2 Recorder output2