Inficon PEG100 Medium to Ultra-High Vacuum Gauge Bedienungsanleitung

tina14e1Penning GaugeOPERATING MANUALPEG100Part Number351-000351-002tina14e1Penning GaugeOPERATING MANUALPEG100Part Number351-000351-002

10tina14e1 (0106) PEG100.ga10tina14e1 (0106) PEG100.ga37685142LED"POWER"LED"READY"Rv7,48 MΩ+ 10,5 VΩ100 k2,8 kV1,6 kVF

2.2.1 Power SupplyWarningThe PEG100 may only be connected tosupply units or measuring instrumentswhich meet the requirements of mainsisolated extra-lo

1. Table 1 has been included to clarify the relationshipbetween the output voltage and the pressure.NoteThe measurement signal provided by the PEG100d

2.3 Start-upConnect the PEG100 according to Section 2.1 and 2.2.Warning A high tension which is dangerous whentouched is applied to the sensor in theP

No LED on.- Supply voltage is missing.→ Measurement signal: 0 VOnly the orange LED (4/1) is on.- The supply voltage is present.- The high tension has

out, so that the accuracy of the measurements in therange below 1·10-6mbar is improved.NoteWhen using the PEG100 chiefly in the UHV range (< 10-8mb

3 Maintenance3.1 Service at INFICONWarning Contaminated products (e.g. radioac-tive, toxic, caustic or microbiologicalhazard) can be detrimental to he

3.3.2 Disassembly of the SensorThe sensor consists of the housing, the anode ring (5/4)with ignition aid (5/2) and the cathode plate (5/5). SeeFig. 7.

mics protection disc (5/3) which protects the currentfeed-through against contamination.3.3.4 Assembly of the SensorThe sensor is reassembled in the r

5 DisposalWarning Contaminated partsContaminated parts can be detrimentalto health and environment.Before beginning to work, find out whether any part

General RemarksWe reserve the right to alter the design or any data givenin these Operating Instructions.The illustrations are not binding.Contents Pa

Annex 1Table 1 Relationship between output voltage and pressure (U = 0.4 V; “not ignited”)U (Out) Pressure[V] [mbar]0.667 1.00E-090.8 1.26E-091 1.78E-

21tina14e1 (0106) PEG100.gatina14e1 (0106) PEG100.ga21Characteristic PEG100Equation:U(a) = [1.33·lg (p / mbar) + 12.66] VoltPressure p / m

22tina14e1 (0106) PEG100.gatina14e1 (0106) PEG100.ga22Annex 2PTR 22510...10 V3526714,5 ... 36 VGND+8Example for connecting the PEG100: Swi

23tina14e1 (0106) PEG100.gatina14e1 (0106) PEG100.ga23135210...10 V0...10 V3526714,5 ... 36 VGND+Example for connecting the PEG100: Switch

24tina14e1 (0106) PEG100.gatina14e1 (0106) PEG100.ga24EEC Declaration of Conformityas defined by the Directive relating to machinery98/37/

25tina14e1 (0106) PEG100.ga25tina14e1 (0106) PEG100.ga

tina14e1 (0106) PEG100.gatina14e1 (0106) PEG100.gaINFICON LIMITED:FL-9108 Balzers, Principality of LiechtensteinPhone: +423 388 3111 Fax:

1 Description1.1 GeneralThe PEG100 Penning Gauge is supplied ready for ope-ration. Even so, we recommend to read these OperatingInstructions with care

1.1.1 PurposeThe PEG100 Penning Gauge is a compact active pres-sure converter housing a measurement system as wellas the corresponding operating elect

Status displaysOperation (POWER) orange LEDReady to measure (ignited) READY green LED1.2.2 Measurement SystemMeasurement system detachableVacuum conne

1.2.6 Mechanical DataDimensions (WxHxD) 80 x 126 x 73 mmWeight 500 g approx.1.2.7 Ambient ConditionsStorage temperature range -20 °C to +70 °CClima

1.4 Equipment1.4.1 Supplied EquipmentPEG100, DN 25 KF Part No. 351-000PEG100, DN 40 CF Part No. 351-002Replacement cathode plate of titanium --Replace

8tina14e1 (0106) PEG100.ga8tina14e1 (0106) PEG100.gaDN 25 KF143,511473POWER READY2580DN 40 CF130,512DN 40 CFDN 25 KFFig. 1 Dimensional dr

2.2 Electrical ConnectionThe supply voltage and the high voltage switching signalas well as the measurement voltage signal are carriedthrough the 8-wa