Inficon Front Load Single Sensor Bedienungsanleitung

OPERATING MANUALFront Load Single and DualSensorsPN 074-156NCover Page

TOC - 4 PN 074-156NFront Load Single and Dual Sensors Operating ManuaThis page is intentionally blank.

1 - 1PN 074-156NFront Load Single and Dual Sensors Operating Manual Chapter 1Introduction1.1 IntroductionINFICON Front Load Sensors (see Figure 1-1)

1 - 2PN 074-156NFront Load Single and Dual Sensors Operating Manual1.2 Definition of Notes, Cautions and WarningsBefore using this manual, please tak

1 - 3PN 074-156NFront Load Single and Dual Sensors Operating Manual 1.3.1 Returning Sensor to INFICONDo not return any sensor component to INFICON be

1 - 4PN 074-156NFront Load Single and Dual Sensors Operating Manual1.4.1 Single Sensor Configuration Overview and PartsFront Load Single Sensor . .

1 - 5PN 074-156NFront Load Single and Dual Sensors Operating Manual 1.4.2 Dual Sensor Configuration Overview and PartsFront Load Dual Sensor . . . .

1 - 6PN 074-156NFront Load Single and Dual Sensors Operating Manual1.5 Front Load Single Sensors (PN SL-XXXXX)Figure 1-4 Standard sensorFigure 1-5

1 - 7PN 074-156NFront Load Single and Dual Sensors Operating Manual 1.5.1 SpecificationsMaximum bakeout temperature with no water . . . . . . . . .

1 - 8PN 074-156NFront Load Single and Dual Sensors Operating Manual1.5.2 MaterialsBody and Holder . . . . . . . . . . . . . . . 304 stainless steelS

1 - 9PN 074-156NFront Load Single and Dual Sensors Operating Manual Water Quality . . . . . . . . . . . . . . . . . . Coolant should not contain chlor

1 - 10PN 074-156NFront Load Single and Dual Sensors Operating ManualUFigure 1-6 Standard crystal sensor outline

1 - 11PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 1-7 PN 750-211-GX standard crystal sensor assembly

1 - 12PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 1-8 Right angle crystal sensor outline

1 - 13PN 074-156NFront Load Single and Dual Sensors Operating Manual ,Figure 1-9 PN 750-213-GX right angle crystal sensor assembly

1 - 14PN 074-156NFront Load Single and Dual Sensors Operating Manual1.6 Front Load Dual Sensor (PN DL-AXXX)Figure 1-10 Front Load Dual Sensor1.6.1

1 - 15PN 074-156NFront Load Single and Dual Sensors Operating Manual 1.6.2 MaterialsBody and Holder . . . . . . . . . . . . . . . 304 stainless stee

1 - 16PN 074-156NFront Load Single and Dual Sensors Operating ManualWater Quality . . . . . . . . . . . . . . . . . . Coolant should not contain chlor

1 - 17PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 1-11 Dual crystal sensor outline

1 - 18PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 1-12 PN 750-212-GX dual crystal sensor assembly

1 - 19PN 074-156NFront Load Single and Dual Sensors Operating Manual 1.7 Shutter Module (PN 750-210-G1 and 750-210-G3)Figure 1-13 Shutter module1.7.

OPERATING MANUALFront Load Single and DualSensorsPN 074-156NTitle Pagewww.inficon.com [email protected]©2014 INFICON®

1 - 20PN 074-156NFront Load Single and Dual Sensors Operating Manual1.7.2 Shutter Module DrawingsThe following Shutter Module Assembly Drawings provi

1 - 21PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 1-14 PN 750-210-G1, 76.2 cm (30 in.) shutter module

1 - 22PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 1-15 PN 750-210-G3, 121.9 cm (48 in.) shutter module

1 - 23PN 074-156NFront Load Single and Dual Sensors Operating Manual 1.8 FeedthroughsNOTE: Sensor/feedthrough combination temperature specifications

1 - 24PN 074-156NFront Load Single and Dual Sensors Operating Manual1.8.2 Specifications for CF40 (2-3/4 in. ConFlat) Mounting . . . . . . . . . . .

1 - 25PN 074-156NFront Load Single and Dual Sensors Operating Manual 1.8.3 Feedthrough DrawingsThe following Feedthrough Outline Drawings provide dim

1 - 26PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 1-16 2.54 cm (1 in.) bolt feedthrough with two tubes, one coax (PN 002-042

1 - 27PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 1-17 2.54 cm (1 in.) bolt feedthrough with three tubes, one coax (PN 750-

1 - 28PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 1-18 2.54 cm (1 in.) bolt feedthrough with three tubes, two coax (PN 750-7

1 - 29PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 1-19 2.54 cm (1 in.) bolt feedthrough with two tubes, one coax, with Ultr

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.RateWatcher™ is a registered trademark o

1 - 30PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 1-20 CF40 (2-3/4 in. ConFlat) feedthrough with two tubes, one coax (PN 002

1 - 31PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 1-21 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, one coax (PN

1 - 32PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 1-22 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, two coax (PN 0

1 - 33PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 1-23 CF40 (2-3/4 in. ConFlat) feedthrough with two tubes, one coax, with

1 - 34PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 1-24 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, one coax, with

1 - 35PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 1-25 CF40 (2-3/4 in. ConFlat) feedthrough with three tubes, two coax, wit

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2 - 1PN 074-156NFront Load Single and Dual Sensors Operating Manual Chapter 2Sensor Installation2.1 Pre-installation Sensor CheckPrior to installing

2 - 2PN 074-156NFront Load Single and Dual Sensors Operating Manual2.1.2 Sensor Check with STM-2XM, STM-3, SQM-160, SQC-310, SQM-242, or IQM-233 Depo

2 - 3PN 074-156NFront Load Single and Dual Sensors Operating Manual 2.1.3 Sensor Check with Q-pod™ or STM-2 Deposition Monitor1 Connect the in-vacuum

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the

2 - 4PN 074-156NFront Load Single and Dual Sensors Operating Manual2.1.4 Sensor Shutter CheckTemporarily connect an air supply to the actuator air tu

2 - 5PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 2-1 Typical installation>Mounting BrackettIn-Vacuum Cable(Routed withwa

2 - 6PN 074-156NFront Load Single and Dual Sensors Operating ManualThe sensor head must be installed such that the face of the crystal is perpendicula

2 - 7PN 074-156NFront Load Single and Dual Sensors Operating Manual In many cases installing multiple sensors to monitor one source can improve thickn

2 - 8PN 074-156NFront Load Single and Dual Sensors Operating Manual4 Form, measure, and mark the sensor tubes (see section 2.3.1 on page 2-10).NOTE: U

2 - 9PN 074-156NFront Load Single and Dual Sensors Operating Manual CAUTIONExcessive application of brazing material, or excessive heat due to brazing

2 - 10PN 074-156NFront Load Single and Dual Sensors Operating Manual2.3.1 Tube BendingCAUTIONRead this entire section before attempting to bend the t

2 - 11PN 074-156NFront Load Single and Dual Sensors Operating Manual 2.4 Sensor Shutter Module Installation on Existing EquipmentInstallation of sens

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3 - 1PN 074-156NFront Load Single and Dual Sensors Operating Manual Chapter 3Solenoid Valve Assembly Installation3.1 IntroductionThe solenoid valve a

3 - 2PN 074-156NFront Load Single and Dual Sensors Operating Manual8 Connect the 3.175 mm (1/8 in.) air tube from the A port of the solenoid valve to

3 - 3PN 074-156NFront Load Single and Dual Sensors Operating Manual INFICON CF40 (2-3/4 in. ConFlat) feedthroughs with air lines are equipped with a f

3 - 4PN 074-156NFront Load Single and Dual Sensors Operating Manual3.4 Pneumatic ConnectionsFigure 3-1 Pneumatic solenoid valve tube connections3.5

3 - 5PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 3-2 Solenoid valve

3 - 6PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 3-3 CF40 (2-3/4 in. ConFlat) dual coaxial feedthrough and solenoid valve ou

4 - 1PN 074-156NFront Load Single and Dual Sensors Operating Manual Chapter 4Maintenance and Spare Parts4.1 General PrecautionsCAUTIONWear clean nylo

4 - 2PN 074-156NFront Load Single and Dual Sensors Operating Manual4.1.3 Maintain the Temperature of the CrystalPeriodically measure the water flow r

4 - 3PN 074-156NFront Load Single and Dual Sensors Operating Manual 2 Insert the tapered end of the crystal snatcher (PN 008-007) into the ceramic ret

4 - 4PN 074-156NFront Load Single and Dual Sensors Operating ManualFigure 4-2 Standard crystal sensor (exploded)CAUTIONNever deposit material on a se

4 - 5PN 074-156NFront Load Single and Dual Sensors Operating Manual 4.3 Sensor MaintenanceThese maintenance requirements apply to the Front Load Sing

TOC - 1PN 074-156NFront Load Single and Dual Sensors Operating Manual Table Of ContentsCover PageTitle PageTrademarksDisclaimerCopyrightWarrantyChap

4 - 6PN 074-156NFront Load Single and Dual Sensors Operating Manual4.3.2 Cleaning the Crystal HolderIn dielectric coating applications, the crystal s

4 - 7PN 074-156NFront Load Single and Dual Sensors Operating Manual 4.3.3 Adjusting the Crystal Holder Retainer SpringIf the ceramic retainer is not

4 - 8PN 074-156NFront Load Single and Dual Sensors Operating Manual4.3.4 Replacing the Finger Spring The finger spring (PN 750-171-P1) that retains t

4 - 9PN 074-156NFront Load Single and Dual Sensors Operating Manual 4.3.5 Lubricating the Shutter ModuleThe shutter module should be lubricated appro

4 - 10PN 074-156NFront Load Single and Dual Sensors Operating Manual4.4 Spare Parts and AccessoriesSingle Body Assembly with TubingStandard 76 cm (30

4 - 11PN 074-156NFront Load Single and Dual Sensors Operating Manual In-Vacuum Cable15.2 cm (6 in.). . . . . . . . . . . . . . . PN 321-039-G1225.4 cm

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5 - 1PN 074-156NFront Load Single and Dual Sensors Operating Manual Chapter 5Troubleshooting5.1 Troubleshooting ToolsIf the Front Load Sensor fails t

5 - 2PN 074-156NFront Load Single and Dual Sensors Operating ManualCrystal ceases to oscillate during deposition before it reaches its “normal” life.C

5 - 3PN 074-156NFront Load Single and Dual Sensors Operating Manual 5.1.2 Digital MultimeterA useful tool for diagnosing sensor problems is the Digit

TOC - 2 PN 074-156NFront Load Single and Dual Sensors Operating ManuaChapter 2Sensor Installation2.1 Pre-installation Sensor Check . . . . . . . . .

5 - 4PN 074-156NFront Load Single and Dual Sensors Operating Manual5.1.2.1 Electrical Isolation Check1 Remove the Crystal Holder from the sensor head

5 - 5PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 5-2 Sensor head isolation check7 Disconnect the in-vacuum cable from the f

5 - 6PN 074-156NFront Load Single and Dual Sensors Operating Manual5.1.2.2 Electrical Continuity Check1 Select the DMM ohmmeter function and a low re

5 - 7PN 074-156NFront Load Single and Dual Sensors Operating Manual 5 At the feedthrough, measure resistance between center contact and shield of the

5 - 8PN 074-156NFront Load Single and Dual Sensors Operating Manual9 Measure resistance between the center contact of the coaxial connector and leaf s

5 - 9PN 074-156NFront Load Single and Dual Sensors Operating Manual 10 Disconnect the in-vacuum cable from the feedthrough.11 At the feedthrough, meas

5 - 10PN 074-156NFront Load Single and Dual Sensors Operating Manual5.1.3 Crystal Sensor EmulatorA very useful tool for rapidly evaluating the cause

5 - 11PN 074-156NFront Load Single and Dual Sensors Operating Manual Figure 5-8 Crystal Sensor Emulator attachment points5.1.3.1 Measurement System

5 - 12PN 074-156NFront Load Single and Dual Sensors Operating Manual5.1.3.2 Crystal Holder and Ceramic Retainer CheckNOTE: The crystal holder connect

5 - 13PN 074-156NFront Load Single and Dual Sensors Operating Manual 5.1.3.3 Feedthrough and In-Vacuum Cable Check1 Refer to Figure 5-8 on page 5-11.

TOC - 3PN 074-156NFront Load Single and Dual Sensors Operating Manual Chapter 5Troubleshooting5.1 Troubleshooting Tools . . . . . . . . . . . . . .

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