Inficon Front Load Single Sensor Bedienungsanleitung PDF herunterladen (Seite 14)

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PN 074-156N

Front Load Single and Dual Sensors Operating Manual

1.4.1 Single Sensor Configuration Overview and Parts

Front Load Single Sensor . . . . . . . . . . . SL-XXXXX, see Figure 1-2.

Figure 1-2 Front Load Single Sensor configurations

Thin Film Manuals CD . . . . . . . . . . . . . . . . . . . . . . . PN 074-5000-G1

Crystal Snatcher. . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 008-007

78.1 cm (30.75 in.) In-Vacuum Cable. . . . . . . . . . . . PN 007-044

(standard length)

152.4 cm (60 in.) In-Vacuum Cable . . . . . . . . . . . . . PN 321-039-G13

(extended length)

Molybdenum Disulfide in Alcohol . . . . . . . . . . . . . . . PN 750-191-G1

(provided only with shuttered sensors)

Tube Bender Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-037-G1

(provided only with non-welded sensors)

S L –

NOTE 1:

Orders for a WELDED sensor/feedthrough combination cannot

be accepted without a completed sensor length specification

form (provided by INFICON). Once a welded sensor order is

confirmed, it can not be canceled.

NOTE 2:

Feedthrough configuration varies depending on options

selected (with or without shutter, type of feedthrough, etc).

Example: SL-A0E37 uses feedthrough PN 002-042 while

SL-A1E37 uses feedthrough PN 750-030-G1.

Type of Sensor

(Includes in-vacuum cable.

Crystals sold separately.)

Standard sensor

(water lines parallel)

Right angle sensor

(water lines perpendicular)

Shutter Assembly – SEE NOTE 4

None

Standard shutter

Length of Sensor –

SEE NOTES 1 and 3

Standard length:

20.3 to 71.1 cm (8 to 28 in.)

includes 78.1 cm (30.75 in.)

in-vacuum cable. SEE NOTE 6

Extended length:

71.1 to 121.9 cm (28 to 48 in.)

includes 152.4 cm (60 in.)

in-vacuum cable. SEE NOTE 6

Feedthrough Connection –

SEE NOTE 4

Sensor not connection to

feedthrough

Sensor welded to feedthrough

Feedthrough equipped with

Ultra-Torr

compression fittings

(allows for adjustable sensor

length)

Feedthrough – SEE NOTE 2

None

1 in. bolt

CF40

NOTE 3:

Sensor lengths are measured from center of the crystal to the

vacuum side (sealing surface) of the feedthrough (see length

specification form).

NOTE 4:

Sensors ordered with shutters and 1 in. bolt style feedthrough can

only be welded (compression fittings not available).

NOTE 5:

Front Load sensors ordered with a CF40 feedthrough and a shutter

can not be welded due to dimensional limits of the CF40.

NOTE 6:

For sensors ordered without a weld connection (option “0” or “8”),

tubes are made to a length of approximately 76.2 cm (30 in.) for

“E” length and approximately 121.9 cm (48 in.) for “G” length

sensors.

Operation with a 152.4 cm (60 in.) cable requires a monitor /

controller with ModeLock technology (XTC/3, IC6, Cygnus 2).

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