Inficon BPG400 ATM to Ultra-High Vacuum Gauge Bedienungsanleitung

Operating Manualtina03e1-b (2004-02) 1Bayard-Alpert Pirani GaugeBPG400BPG400-SDBPG400-SPBPG400-SR RS485

10 tina03e1-b (2004-02) BPG400 v1.omData rateData formatConnections (sensor cable connector)TxD (Transmit Data)RxD (Receive Data)GND9600 Baudb

tina03e1-b (2004-02) BPG400 v1.om 11Fieldbus name RS485Data rate 300 … 28'800 BaudDevice address(Adjustable via hexadecimal"ADDRESS&

12 tina03e1-b (2004-02) BPG400 v1.omPart number Part number353-500 353-502353-501 353-503353-505 353-506353-509 353-513(353-507) 1)(353-508)

tina03e1-b (2004-02) BPG400 v1.om 133 InstallationDANGERCaution: overpressure in the vacuum system >1 barInjury caused by released parts an

14 tina03e1-b (2004-02) BPG400 v1.omMake the flange connection to the vacuum system, preferably withoutapplying vacuum grease.When installing

tina03e1-b (2004-02) BPG400 v1.om 15 Remove the electronics unit without twisting it.Removal of the electronics unit is completed. Place the

16 tina03e1-b (2004-02) BPG400 v1.omWith the optional extension (→  52) the sensor can also be baked during opera-tion at temperatures up to

tina03e1-b (2004-02) BPG400 v1.om 17 Slide the electronics unit (2) in to the mechanical stop (be careful to cor-rectly align the pins and no

18 tina03e1-b (2004-02) BPG400 v1.om Carefully place the baffle onto the sensor opening.  Using a pin, press the baffle down in the center u

tina03e1-b (2004-02) BPG400 v1.om 19If the gauge is used with an INFICON VGC103 or VGC40x controller, a corre-sponding sensor cable is require

2 tina03e1-b (2004-02) BPG400 v1.omIn all communications with INFICON, please specify the information on the productnameplate. For convenient

20 tina03e1-b (2004-02) BPG400 v1.omFor reasons of compatibility, the expression "sensor cable" is used for allBPG400 versions in th

tina03e1-b (2004-02) BPG400 v1.om 21. 15891D-Sub, 15 pinsfemale,soldering sideElectrical connectionPin 1 Relay Switching function A, COM co

22 tina03e1-b (2004-02) BPG400 v1.omPlug the sensor connector intothe gauge and secure it with thelocking screws.  Connect the other end of

tina03e1-b (2004-02) BPG400 v1.om 23 Plug the DeviceNet (and sensor) cable connector into the gauge.Sensor cableDeviceNet cable Lock the Dev

24 tina03e1-b (2004-02) BPG400 v1.om Plug the Profibus (and sensor) cable connector into the gauge.Sensor cableProfibus cable Lock the Profi

tina03e1-b (2004-02) BPG400 v1.om 25 Plug the RS485 (and sensor) cable connector into the gauge.Sensor cableRS485 cable Lock the RS485 (and

26 tina03e1-b (2004-02) BPG400 v1.om Connect the gauge to the power supply and lock the connector with thescrews. Connect the RS232C line to

tina03e1-b (2004-02) BPG400 v1.om 274 OperationThe BPG400 vacuum gauges consist of two separate measuring systems (hotcathode Bayard-Alpert (B

28 tina03e1-b (2004-02) BPG400 v1.omUBPirani sensorThe bridge voltage UB is a measure for the gas pressure and is further processedelectronica

tina03e1-b (2004-02) BPG400 v1.om 29When the operating voltage is supplied (→ Technical Data), the output signal isavailable between Pin 2 (+)

tina03e1-b (2004-02) BPG400 v1.om 3Over the whole measuring range, the gauge has a continuous characteristic curveand its measuring signal is

30 tina03e1-b (2004-02) BPG400 v1.omThe gauges with part number353-501 and353-503have a built-in two-line display with an LCD matrix of 32×16

tina03e1-b (2004-02) BPG400 v1.om 31The built-in RS232C interface allows transmission of digital measurement data andinstrument conditions as

32 tina03e1-b (2004-02) BPG400 v1.omBit 1 Bit 0 Definition0 0 Emission off01Emission 25 µA1 0 Emission 5 mA1 1 DegasBit 2 Definition0 1000 m

tina03e1-b (2004-02) BPG400 v1.om 33The example is based on the following output string:Byte No 0 1 2 3 4 5 6 7 8Value 7 5 0 0 242 48 20 10 69

34 tina03e1-b (2004-02) BPG400 v1.omThis interface allows operation of BPG400-SD with part number353-507 and353-508in connection with other de

tina03e1-b (2004-02) BPG400 v1.om 35The admissible data rate depends on a number of factors such as system pa-rameters and cable length →  [4

36 tina03e1-b (2004-02) BPG400 v1.omThis interface allows operation of BPG400-SP with part number353-505 and353-506in connection with other de

tina03e1-b (2004-02) BPG400 v1.om 37This interface allows operation of BPG400-SR with part number353-509 and353-513in connection with other de

38 tina03e1-b (2004-02) BPG400 v1.omFor unambiguous identification of the gauge in a RS485 bus environment, a deviceaddress is required.The de

tina03e1-b (2004-02) BPG400 v1.om 39In the table "Commands and Responses" (→  40) the following variables areused:Variable Descript

4 tina03e1-b (2004-02) BPG400 v1.omContentsProduct Identification 2Validity 2Intended Use 2Functional Principle 3Trademarks 31 Safety 61.1 Sym

40 tina03e1-b (2004-02) BPG400 v1.omThe following table lists all permissible commands of the RS485 host and the cor-responding responses of a

tina03e1-b (2004-02) BPG400 v1.om 41"Commands and Responses" continued:Host Command HostCommand syntaxBPG modeResponse syntaxRIG mod

42 tina03e1-b (2004-02) BPG400 v1.omThe BPG400-SR has two independent switching functions. A floating relay contactis available for each switc

tina03e1-b (2004-02) BPG400 v1.om 43The programming procedure of the switching functions via the RS485 interface im-plemented in the BPG400-SR

44 tina03e1-b (2004-02) BPG400 v1.omThe gauges BPG400-SD, BPG400-SP and BPG400-SR have two independent,manually settable switching functions.

tina03e1-b (2004-02) BPG400 v1.om 45The procedure for setting thresholds is identical for both switching functions. Put the gauge into operat

46 tina03e1-b (2004-02) BPG400 v1.om5 DeinstallationDANGERCaution: contaminated partsContaminated parts can be detrimental to health and envir

tina03e1-b (2004-02) BPG400 v1.om 476 Maintenance, RepairDANGERCaution: contaminated partsContaminated parts can be detrimental to health and

48 tina03e1-b (2004-02) BPG400 v1.om• Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)Gauges BPG400-SD, -SP and -SR are mechanically sl

tina03e1-b (2004-02) BPG400 v1.om 49• Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)The push button used for the adjustment at atmosp

tina03e1-b (2004-02) BPG400 v1.om 55 Deinstallation 466 Maintenance, Repair 476.1 Maintenance 476.1.1 Cleaning the Gauge 476.2 Adjusting the G

50 tina03e1-b (2004-02) BPG400 v1.omIf the cause of a fault is suspected to be in the sensor, the following checks can bemade with an ohmmeter

tina03e1-b (2004-02) BPG400 v1.om 51Replacement is necessary, when• the sensor is severely contaminated• the sensor is mechanically deformed

52 tina03e1-b (2004-02) BPG400 v1.om7 OptionsPart number24 VDC power supply / RS232C line (→  25)353-511Extension 100 mm (→  16)353-510Baffl

tina03e1-b (2004-02) BPG400 v1.om 5310 Returning the ProductWARNINGCaution: forwarding contaminated productsContaminated products (e.g. radioa

54 tina03e1-b (2004-02) BPG400 v1.omAppendixp = 10(U - 7.75) / 0.75 + cU = 0.75 × (log p - c) + 7.75where U p c[V] [mbar] 0[V] [Pa] 2[V] [Torr

tina03e1-b (2004-02) BPG400 v1.om 55Output signal U[V] [mbar]Pressure p[Torr] [Pa]0.3 / 0.5Sensor error (→  49)0.51 … 0.774 Inadmissible rang

56 tina03e1-b (2004-02) BPG400 v1.omThe gas type dependence in the pressure range 10-2 … 1 mbar can be compen-sated by means of the following

tina03e1-b (2004-02) BPG400 v1.om 57 [1] www.inficon.comCommunication ProtocolDeviceNet™ BPG400-SDtira03e1INFICON AG, LI–9496 Balzers, Liecht

58 tina03e1-b (0402) BPG400 v1.omDeclaration of ContaminationThe service, repair, and/or disposal of vacuum equipment and components will only

tina03e1-b (2004-02) BPG400 v1.om 59Notes

6 tina03e1-b (2004-02) BPG400 v1.om1 SafetyDANGERInformation on preventing any kind of physical injury.WARNINGInformation on preventing extens

LI–9496 BalzersLiechtensteinTel +423 / 388 3111Fax +423 / 388 3700Original: German tina03d1-b (2004-02) [email protected] i na03e1- bwww.infic

tina03e1-b (2004-02) BPG400 v1.om 7• Adhere to the applicable regulations and take the necessary precautions for theprocess media used.Consid

8 tina03e1-b (2004-02) BPG400 v1.om2 Technical DataMeasuring range (air, N2, O2) 5×10-10 … 1000 mbar, continuousAccuracy 15% of reading in the

tina03e1-b (2004-02) BPG400 v1.om 9Operating voltage at the gauge +24 VDC (20 … 28 VDC) 1)ripple max. 2 VppPower consumptionStandardDegasEmiss