Inficon PLO-10i Phase Lock Oscillator Bedienungsanleitung

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Inhaltsverzeichnis

Seite 1 - PLO-10 Series

OPERATION AND SERVICE MANUALPLO-10 SeriesPhase Lock OscillatorIPN 605800 Rev. G

Seite 3

PLO-10 PHASE LOCK OSCILLATOR GENERAL DESCRIPTION 1-11 GENERAL DESCRIPTION The INFICON Phase Lock Oscillator was developed specifically to support th

Seite 4

PLO-10 PHASE LOCK OSCILLATOR GENERAL DESCRIPTION 1-2 crystal, the in-phase component (at zero phase error, there is no out of phase component) of th

Seite 5 - Warranty

PLO-10 PHASE LOCK OSCILLATOR GENERAL DESCRIPTION 1-31.1.6 CRYSTAL FACE ISOLATION (PLO-10i Models only) The PLO-10i Models provide transformer isola

Seite 6

PLO-10 PHASE LOCK OSCILLATOR GENERAL DESCRIPTION 1-4 Figure 1 Equivalent Phase Error Due to Imperfect Capacitance Cancellation Polar Plot of Cryst

Seite 7 - Table of Contents

PLO-10 PHASE LOCK OSCILLATOR GENERAL DESCRIPTION 1-5 1.2.4 CONDUCTANCE ERRORS Conductance measurements are meaningful over the range of 0.0001 to 0.

Seite 8

PLO-10 PHASE LOCK OSCILLATOR GENERAL DESCRIPTION 1-6 1.3 SPECIFICATIONS Frequency range: 3.8 to 6.06 MHz, or 5.1 to 10 MHz Capacitance compensati

Seite 9 - Table of Figures

PLO-10 PHASE LOCK OSCILLATOR GENERAL DESCRIPTION 1-7 1.4 ACCESSORIES Part Number Description 172205 CHT-100 Crystal Holder, Teflon®, SMB Connector

Seite 11 - 1 GENERAL DESCRIPTION

PLO-10 PHASE LOCK OSCILLATOR UNDERSTANDING AND SETTING UP THE INFICON PLO-10 2-12 UNDERSTANDING AND SETTING UP THE INFICON PLO-10 There are several

Seite 13 - CANCELLATION

PLO-10 PHASE LOCK OSCILLATOR UNDERSTANDING AND SETTING UP THE INFICON PLO-10 2-2 Connect a frequency counter to the Frequency Output. Connect a volt

Seite 14

PLO-10 PHASE LOCK OSCILLATOR UNDERSTANDING AND SETTING UP THE INFICON PLO-10 2-3 Figure 2 System Connections

Seite 15 - 1.2.4 CONDUCTANCE ERRORS

PLO-10 PHASE LOCK OSCILLATOR UNDERSTANDING AND SETTING UP THE INFICON PLO-10 2-4 Figure 3 Front Connections

Seite 16

PLO-10 PHASE LOCK OSCILLATOR UNDERSTANDING AND SETTING UP THE INFICON PLO-10 2-5 Figure 4 Rear Connections

Seite 18

PLO-10 PHASE LOCK OSCILLATOR CALCULATING CRYSTAL RESISTANCE 3-13 CALCULATING CRYSTAL RESISTANCE The PLO-10 provides a dc output voltage proportion

Seite 20

PLO-10 PHASE LOCK OSCILLATOR ADJUSTING THE CAPACITANCE CANCELLATION 4-14 ADJUSTING THE CAPACITANCE CANCELLATION Proper adjustment of the Capacitanc

Seite 21

PLO-10 PHASE LOCK OSCILLATOR CALCULATING CRYSTAL POWER 4-2 If you are using a crystal holder and cable supplied with your PLO-10 then you should no

Seite 22

PLO-10 PHASE LOCK OSCILLATOR ADJUSTING THE CAPACITANCE CANCELLATION 4-3this is not the point you want. Back off the course adjustment until the fla

Seite 23

OPERATION AND SERVICE MANUALPLO-10 SeriesPhase Lock OscillatorIPN 605800 Rev. Gwww.inficon.com [email protected] to our continuing program of

Seite 25 - Resistance vs. Voltage

PLO-10 PHASE LOCK OSCILLATOR FREQUENCY ERRORS DUE TO IMPERFECT CAPACITANCE CANCELLATION 5-15 FREQUENCY ERRORS DUE TO IMPERFECT CAPACITANCE CANCELLA

Seite 26

PLO-10 PHASE LOCK OSCILLATOR FREQUENCY ERRORS DUE TO IMPERFECT CAPACITANCE CANCELLATION 5-2 Effective Phase error = arctangent ((31.4e-6)/(100e-3))

Seite 27

PLO-10 PHASE LOCK OSCILLATOR CALCULATING CRYSTAL POWER 6-16 CALCULATING CRYSTAL POWER Using the PLO conductance voltage output, crystal power can b

Seite 28

PLO-10 PHASE LOCK OSCILLATOR CALCULATING CRYSTAL POWER 6-2Figure 9 PLO-10 Assembly

Seite 29

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-17 CRYSTALS, HOLDERS AND FLOW CELL An essential part of the PLO-10 Oscillator is th

Seite 30

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-2Figure 10 INFICON 1" Crystal – Electrode Configuration The figure below shows a

Seite 31

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-37.1.3 CRYSTAL SURFACE FINISH Studies have shown that electrode surface roughness c

Seite 32

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-4 (0.081 Hz/ng/cm2 for a 6 MHz crystal @ 20° C) (0.181 Hz/ng/cm2 for a 9 MHz crystal

Seite 33 - 6 CALCULATING CRYSTAL POWER

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-5small mass changes over long periods of time. 7.1.8 CRYSTAL LIFE EXPECTANCY It is

Seite 34 - PLO-10 PHASE LOCK OSCILLATOR

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.INFICON® is a trademark of INFICON Inc.A

Seite 35

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-6 frequency of a sensor crystal on temperature is generally small in experiments in

Seite 36 - 7.1.2 CRYSTAL PARAMETERS

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-7 Figure 12 Frequency vs. Temperature of INFICON 1" AT-Cut Crystal for 90 C Fre

Seite 37 - . INFICON’s

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-8 dry the crystal. It is better to chase liquid off the crystal than to let it evap

Seite 38 - 7.1.7 STABILITY

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-97.2.1.5 Polystyrene removal To clean polystyrene (PS) off a crystal, immerse the cr

Seite 39

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-10 Figure 14 CHC-100 Crystal Holder 7.3.1 HOW TO INSTALL A CRYSTAL IN A INFICON C

Seite 40 - INFICON AT cut for 90C

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-11 Figure 15 Crystal Installation 3. Place the Retainer Ring over the Crystal, wit

Seite 41 - Delta Frequency (Hz)

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-12 7.3.2 HOLDER CARE AND HANDLING With a robust design, INFICON crystal holders re

Seite 42 - surfaces

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-13♦ Always act fast in the event that liquids or chemicals have entered the crystal

Seite 43 - 7.2.2.1 SPIN COATING

PLO-10 PHASE LOCK OSCILLATOR CRYSTALS, HOLDERS AND FLOW CELL 7-14 outlet tubes with a .047” I.D. x .062” O.D., compatible with 0.062” I.D. tubing.

Seite 44 - INFICON CRYSTAL HOLDER

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-18 THEORY OF OPERATION Sauerbrey was the first to recognize the ability of the Quartz Crystal M

Seite 45

INFICON warrants the product to be free of functional defects in material and workmanship and that it will perform in accordance with its published sp

Seite 46

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-2 fq = Resonant frequency of unloaded crystal in Hz. f = Resonant frequency of loaded crystal

Seite 47

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-3mass. Notice that the units of the frequency constant for quartz is length/time or velocity.

Seite 48

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-4 8.4 LIQUID MEASUREMENTS QCMs have been used as gas-phase mass detectors with lossless films fo

Seite 49 - 8 THEORY OF OPERATION

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-5Where: R∆ = change in series resonance resistance in , rA = active area of INFICON 1-inch cr

Seite 50 - THEORY OF OPERATION

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-6 Frequency Change vs. Wt % Glycerol-10000-9000-8000-7000-6000-5000-4000-3000-2000-100000 102030

Seite 51

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-7Resistance Change vs. Wt % Glycerol0100020003000400050000 20406080100Wt % GlycerolDelta Resista

Seite 52

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-8 Lη = Viscosity of the liquid in contact with the electrode in kg/m/sec Sω = Angular frequency

Seite 53

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-9 Figure 18 Crystal Equivalent Circuit Because a crystal’s impedance is minimum at resonance it

Seite 54

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-10 Figure 19 Polar Plot of Crystal Admittance Figure 20 shows the conductance in terms of magn

Seite 55

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-11 Figure 20 Admittance vs. Frequency, Magnitude and Phase of High Q Crystal Figure 21 Admittan

Seite 57

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-12 When the above complex conductance is plotted in polar coordinates, one obtains a circle as s

Seite 58

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-13 Figure 23 Polar Admittance Plot of Low Q Crystal Figure 24 Admittance vs. Frequency, Real a

Seite 59

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-14 offset. The PLO-10 provides a mechanism for canceling out the imaginary current effectively

Seite 60

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-15 Figure 26 Non-zero Phase Lock Figure 26 shows the result of a non-zero phase lock. Note t

Seite 61

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-16 the crystal’s conductance. This current is monitored by the PLO-10 and displayed as crystal r

Seite 62

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-178.7.2 FREQUENCY ERROR DUE TO PHASE ERROR Given some finite zero phase error, the resulting fr

Seite 63

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-18 Or, Frequency Error = -(1/(2*57.3))(Phase Error, in degrees)(Bandwidth) For the above ten-oh

Seite 64

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-19Frequency Error vs. Crystal Resistance0.0010.0100.1001.00010.000100.0001000.00010000.000100000

Seite 65

PLO-10 PHASE LOCK OSCILLATOR THEORY OF OPERATION 8-20 Figure 28 Crystal Power Dissipation vs. Crystal ResistanceCrystal Power vs. Crystal Resistan

Seite 66

PLO-10 PHASE LOCK OSCILLATOR GLOSSARY 9-1 9 GLOSSARY Å Symbol for angstrom, a unit of length equal to 10-10 meter. Conductance The ability to c

Seite 67

iv Table of Contents OPERATION AND SERVICE MANUAL...I

Seite 68

PLO-10 PHASE LOCK OSCILLATOR GLOSSARY 9-2 O.D. Abbreviation for Outside Diameter. Usually use in specifying a tube size in the form inch I.D. x i

Seite 69 - GLOSSARY

PLO-10 PHASE LOCK OSCILLATOR GLOSSARY 9-3VCO Voltage Controlled Oscillator. An oscillator circuit designed so that the output frequency can be co

Seite 71

PLO-10 PHASE LOCK OSCILLATOR REFERENCES 10-110 REFERENCES 1 Martin, Stephen, et. al.,

Seite 72

PLO-10 PHASE LOCK OSCILLATOR REFERENCES 10-2

Seite 73 - 10 REFERENCES

v7.2.2.3 PHYSICAL VACUUM DEPOSITION (PVD) ..... 7-9 7.3 CRYSTAL HOLDERS...

Seite 74 - REFERENCES

vi Table of Figures FIGURE 1 EQUIVALENT PHASE ERROR DUE TO IMPERFECT CAPACITANCE CANCELLATION....... 1-4 FIGURE 2 SYSTEM CONNECTI

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