Inficon Composer Elite Gas Concentration Monitor Handbücher

Bedienungsanleitungen und Benutzerhandbücher für Ausrüstung Inficon Composer Elite Gas Concentration Monitor.
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Inhaltsverzeichnis

Composer Elite

1

Trademarks

4

Disclaimer

4

Copyright

4

Warranty

7

Table Of Contents

9

TOC - 2

10

Chapter 2

10

Installation

10

Chapter 3

10

Operation

10

Chapter 4

11

Applications Guide

11

Chapter 5

11

Remote Communications

11

TOC - 4

12

TOC - 5

13

Chapter 1

15

Introduction

15

1.2 Using this Manual

16

1.3 How To Contact INFICON

18

1.4 Unpacking and Inspection

19

1.5 Specifications

22

1.5.3 Acoustic Sensor

24

1.5.4 Power Supply

25

1.5.8 Mounting Requirements

27

Located downstream

34

MFC (Mass Flow Controller)

34

Figure 2-3 M4 mounting holes

37

3.1.1 Parameter Entry

41

3.2 Calibration

42

3.2.3 How to Calibrate

43

Figure 3-3 Overview screen

47

Figure 3-6 Sensor screen

50

Frequency (Hz)

60

Absolute Pressure (Torr)

60

H2- 300 Torr

61

H2- 600 Torr

61

H2- 150 Torr

61

Where is the pulse?

62

True Concentration (mole-%)

64

5.4.1 DeviceNet Objects

70

The supported services are:

73

5.4.2 DeviceNet Data Sets

78

5.5 Message Format

87

5.5.1 Command

88

5.5.2 Response

88

5.6 Communication Commands

93

5.6.1 Hello Command

94

5.6.2 Query Commands

94

5.6.3 Update Commands

95

5.6.4 Status Commands

96

PN 074-566-P1B

100

5.6.5 Remote Commands

102

6.2.2 RS-232 Requirements

107

6.2.3 DeviceNet Requirements

107

6.2.1 Computer Requirements

107

6.2.4 Software Installation

108

6.3 Operation

109

6.3.1 User Login

110

6.3.2 Comm Settings

110

6.3.3 Data Storage

111

6.3.4 Diagnostic Files

112

6.3.5 Sensor Version

115

6.3.6 Description

115

6.3.7 Parameters

115

Figure 6-8 Parameter gas tab

116

6.3.8 Zero Reference

117

6.3.9 Data

118

6.3.10 Graph

119

6.3.11 Screen Shot

120

6.3.12 Annotation

121

Chapter 7

123

Maintenance

123

Outlet Tube

124

Inlet Tube

124

Service Ports

124

7.3 Spare Parts

127

Chapter 8

129

Troubleshooting

129

(minimal) when the total

130

Reverse the connections

130

Install new gasket (PN

130

Reference Zero was

131

Contact INFICON

132

Chapter 9

135

Measurement and Theory

135

vs. instrument’s frequency

137

L. In operation, the

138

9.3 Composer Elite Overview

140

9.4.2 Acoustic Sensor

141

Inlet Tube Heater

143

(Heater 2)

143

Over Temperature

143

Appendix A

145

Bibliography

145

Appendix B

147

Material Table

147

Appendix C

149

Outline Drawings

149





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