Inficon IC/5 Thin Film Deposition Controller Bedienungsanleitung

OPERATING MANUALIC/5Thin Film Deposition ControllerIPN 074-237AE

TOC - 2 IPN 074-237AE IC/5 Operating ManualChapter 2Measurement and Control Theory2.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4 - 6 IPN 074-237AE IC/5 Operating ManualPROCESS GAIN . . . . . . . . . . . . . . . 0.01 to 99.999 Å/sec/% pwrThis parameter determines the change in

4 - 7IPN 074-237AEIC/5 Operating ManualRECORDER OUTPUT . . . . . . . . . . . 0 to 6The recorder output number can be programmed for aggregate rate.

4 - 8 IPN 074-237AE IC/5 Operating ManualCRYSTAL QUALITY ’Q’ . . . . . . . . . 0 to 9This parameter is used to ensure tight rate control by monitori

4 - 9IPN 074-237AEIC/5 Operating ManualCRYSTAL STABILITY ’S’ . . . . . . . . 0 to 9The Crystal Stability parameter can also be used to effect a cry

4 - 10 IPN 074-237AE IC/5 Operating ManualFigure 4-7 Source Power Level ProfileMAXIMUM POWER . . . . . . . . . . . . . 0.0 to 99.9%This parameter is

4 - 11IPN 074-237AEIC/5 Operating ManualSOAK POWER 2 . . . . . . . . . . . . . . . 0.0 to 99.9%This parameter sets the power level at which the rate

4 - 12 IPN 074-237AE IC/5 Operating ManualCONTROL DELAY TIME . . . . . . . . . 00:00 to 99:59This is the time interval for the instrument to be held

4 - 13IPN 074-237AEIC/5 Operating ManualIDLE RAMP TIME . . . . . . . . . . . . . . 00:00 to 99:59 min:secThis is the time interval over which the s

4 - 14 IPN 074-237AE IC/5 Operating ManualWEIGHT. . . . . . . . . . . . . . . . . . . . . . 1.0 to 400.0%The Sensor Weight parameter is used to gauge

4 - 15IPN 074-237AEIC/5 Operating Manual4.4 Error Messages in Material Set-UpBAD XTAL AND RUNNINGThis message is displayed when the user attempts t

TOC - 3IPN 074-237AEIC/5 Operating Manual3.6 Special Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

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5 - 1IPN 074-237AEIC/5 Operating ManualChapter 5Process Set-Up5.1 Process Set-Up OverviewThe IC/5 is capable of storing the descriptions and parame

5 - 2 IPN 074-237AE IC/5 Operating ManualFigure 5-2 Process Directory5.2 Process DefinitionSelecting the PROCESS function (key F5) in the Process D

5 - 3IPN 074-237AEIC/5 Operating Manual5.2.1 Layer EditingSelecting the LAYER Editing function in the Process display will take you to a display th

5 - 4 IPN 074-237AE IC/5 Operating Manual.5.3 Layer Definition ParametersMATERIAL INDEX. . . . . . . . . . . . . . 1 to 24 This indicates which of t

5 - 5IPN 074-237AEIC/5 Operating ManualAGGREGATE RATE . . . . . . . . . . . . 0.0 to 999 Å/sec from front panel, 0.00 to 999 Å/sec via communicatio

5 - 6 IPN 074-237AE IC/5 Operating ManualCO-DEPOSITION . . . . . . . . . . . . . . Yes/No This feature allows two Layers to be run concurrently with

5 - 7IPN 074-237AEIC/5 Operating ManualCRUCIBLE. . . . . . . . . . . . . . . . . . . . 1 to 64 (max)This value is used in conjunction with the Numbe

5 - 8 IPN 074-237AE IC/5 Operating ManualSTART RAMP 2. . . . . . . . . . . . . . . . 0.000 to 999.9 kÅThis value determines the thickness at which to

5 - 9IPN 074-237AEIC/5 Operating ManualNO MATERIAL DEFINEDMaterials must be defined to be used in a Process Layer.NOT ENOUGH LAYERSThis message is d

TOC - 4 IPN 074-237AE IC/5 Operating Manual6.5 Logic Statement Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

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6 - 1IPN 074-237AEIC/5 Operating ManualChapter 6I/O Logic Statement Set-Up6.1 I/O Logic Statement OverviewThe IC/5 has programmable logic capabilit

6 - 2 IPN 074-237AE IC/5 Operating Manualsequencing and/or external control events. These “dummy” layers execute very rapidly if the pre and post dep

6 - 3IPN 074-237AEIC/5 Operating Manual6.2.1 Logic Statement DirectoryA logic statement is selected for editing by positioning the box cursor at th

6 - 4 IPN 074-237AE IC/5 Operating Manual6.2.2 Logic Statement EditingFigure 6-3 Logic Event SelectionTable 6-2 Function Key Selection Choices for

6 - 5IPN 074-237AEIC/5 Operating ManualFigure 6-4 Logic ConnectorsIf the cursor is on a connector designated by ccc, pressing F1 (SELECT) will togg

6 - 6 IPN 074-237AE IC/5 Operating Manual3 The ON connector always takes precedence over the AND and OR operators no matter where it appears in the s

6 - 7IPN 074-237AEIC/5 Operating ManualDEPOSITSets the logic condition to be true at the beginning of the Deposit state or in the Manual state. The

6 - 8 IPN 074-237AE IC/5 Operating ManualLAST LAYERSets the logic condition to be true at the beginning of the Last Layer defined for the active proc

6 - 9IPN 074-237AEIC/5 Operating ManualPOST-DEPOSITSets the logic condition to be true at the beginning of the Feed state or the beginning of the Id

TOC - 5IPN 074-237AEIC/5 Operating Manual7.7.4.4 Update Sensor Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2

6 - 10 IPN 074-237AE IC/5 Operating ManualRISE 2Sets the logic condition to be true at the start of Rise Time 2. The condition remains true until th

6 - 11IPN 074-237AEIC/5 Operating ManualSOURCE SWITCHSets the logic condition to be true at the beginning of the Source Switch state. The condition

6 - 12 IPN 074-237AE IC/5 Operating Manual6.4 ’THEN’ Action DefinitionsNOTE: The following are level outputs and once turned on will remain active u

6 - 13IPN 074-237AEIC/5 Operating ManualNON-DEPOSIT CLOCK HOLD (ON/OFF)This feature “holds” the state timer during any non-deposit state. Non-deposi

6 - 14 IPN 074-237AE IC/5 Operating ManualSTOPThis action is identical to pressing the STOP button on the front panel. (Refer to section 3.4.2 on pag

6 - 15IPN 074-237AEIC/5 Operating Manual6.5 Logic Statement ExampleThe logic statement capability of the IC/5 allows for automation of a thin film

6 - 16 IPN 074-237AE IC/5 Operating Manual6.6 I/O Map DirectoryThe I/O Map directory is selected by pressing the F3 key (I/O) in the Program display

6 - 17IPN 074-237AEIC/5 Operating Manual6.7 Define User MessagesUp to 10 user-defined messages can be created and up to 3 can be displayed at the s

6 - 18 IPN 074-237AE IC/5 Operating ManualTable 6-4 Function Key Selection Choices for the Define User Messages DisplayKey Function DescriptionF1 ED

6 - 19IPN 074-237AEIC/5 Operating Manual6.8 Floppy DiskParameters can be saved to and retrieved from the diskette by going to the FLOPPY DISK displ

TOC - 6 IPN 074-237AE IC/5 Operating Manual10.3 Use as a System Controller Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-510.3.

6 - 20 IPN 074-237AE IC/5 Operating Manual.CAUTIONDo not remove the diskette during save or retrieve operations. It is recommended that when doing a

6 - 21IPN 074-237AEIC/5 Operating Manual6.9 Error Messages in I/O Logic Statement Set-UpCANNOT TOGGLE INPUTOutput types can be toggled between Norm

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7 - 1IPN 074-237AEIC/5 Operating ManualChapter 7Remote Communications7.1 Remote Communication Configuration OverviewThere are two types of remote c

7 - 2 IPN 074-237AE IC/5 Operating Manual7.2 Remote Communication ParametersA parameter is selected for entry by positioning the box cursor at the d

7 - 3IPN 074-237AEIC/5 Operating ManualNOTE: If a configuration file from a unit with version 3.50 or earlier firmware is to be loaded into a unit w

7 - 4 IPN 074-237AE IC/5 Operating Manual7.3 Error Messages in Remote Communications ConfigurationIllegal Baud RateThe value you are attempting to e

7 - 5IPN 074-237AEIC/5 Operating ManualThe word format for bit serial lines (RS-232C) is comprised of ten signal bits- eight data bits, one start bi

7 - 6 IPN 074-237AE IC/5 Operating ManualData Terminal Ready (DTR). . . . . . . The instrument informs the host that it is powered up and able to com

7 - 7IPN 074-237AEIC/5 Operating Manual7.5.2 IEEE488 PortAn IEEE488 circuit card may be purchased and installed into the IC/5, IPN 760-142-G1. The

TOC - 7IPN 074-237AEIC/5 Operating Manual12.5 Determining Cross Talk Calibration For Co-Deposition . . . . . . . . . . . . . . . . . . . . . . . .

7 - 8 IPN 074-237AE IC/5 Operating Manual7.5.2.1 IEEE Settings for a National Instruments IEEE-GPIB BoardWhen establishing IEEE communications the f

7 - 9IPN 074-237AEIC/5 Operating Manual7.6.1 INFICON Message FormatsThere are two message formats for the serial ports and one for the IEEE488 port

7 - 10 IPN 074-237AE IC/5 Operating ManualSerial With Checksum FormatHost to Instrument Message<STX>(count)(command)(checksum)Instrument to Hos

7 - 11IPN 074-237AEIC/5 Operating Manual7.7.3 Query CommandsQuery commands are used to request established parameter values. There is a specific qu

7 - 12 IPN 074-237AE IC/5 Operating Manual11 Quality12 Stability13 Maximum Power14 Soak Power 115 Rise Time 116 Soak Time 117 Soak Power 218 Rise Tim

7 - 13IPN 074-237AEIC/5 Operating Manual49 Sensor 6 Tooling50 Sensor 7 Tooling51 Sensor 8 Tooling52 Sensor 1 Cal Thick53 Sensor 2 Cal Thick54 Sensor

7 - 14 IPN 074-237AE IC/5 Operating Manual7.7.3.2 Query Process ParametersFor each command format the symbol þ represents a blank space. The format

7 - 15IPN 074-237AEIC/5 Operating Manual7.7.3.3 Query Utility ParametersFor each command format the symbol þ represents a blank space. The format i

7 - 16 IPN 074-237AE IC/5 Operating Manual7.7.3.4 Query Sensor ParametersFor each command format the symbol þ represents a blank space. The format i

7 - 17IPN 074-237AEIC/5 Operating Manual7.7.3.6 Query Output TypesFor each command format the symbol þ represents a blank space. The format is:QTþo

TOC - 8 IPN 074-237AE IC/5 Operating Manual13.4 Crystal Sensor EmulatorIPN 760-601-G1 or 760-601-G2. . . . . . . . . . . . . . . . . . . . . . . . .

7 - 18 IPN 074-237AE IC/5 Operating Manual7.7.4 UPDATE CommandsUpdate commands are used to change a specified parameter to a new value or condition.

7 - 19IPN 074-237AEIC/5 Operating Manual11 Quality12 Stability13 Maximum Power14 Soak Power 115 Rise Time 116 Soak Time 117 Soak Power 218 Rise Time

7 - 20 IPN 074-237AE IC/5 Operating Manual49 Sensor 6 Tooling50 Sensor 7 Tooling51 Sensor 8 Tooling52 Sensor 1 Cal Thick53 Sensor 2 Cal Thick54 Senso

7 - 21IPN 074-237AEIC/5 Operating Manual7.7.4.2 Update Process ParametersFor each command format the symbol þ represents a blank space. The format

7 - 22 IPN 074-237AE IC/5 Operating Manual7.7.4.3 Update Utility ParametersFor each command format the symbol þ represents a blank space. The format

7 - 23IPN 074-237AEIC/5 Operating Manual7.7.4.4 Update Sensor ParametersFor each command format the symbol þ represents a blank space. The format i

7 - 24 IPN 074-237AE IC/5 Operating Manual7.7.4.6 Update Output TypesFor each command format the symbol þ represents a blank space. The format is:UT

7 - 25IPN 074-237AEIC/5 Operating Manual12 Idle State13 Time Power14 Pre-Deposit15 Deposit16 Post-Deposit17 Manual18 AutoTune19 Thickness Limit20 Fi

7 - 26 IPN 074-237AE IC/5 Operating ManualTable 7-18 Update Logic Statements - Input Actionaction code Input Action0 Clear the Input Assignments1 St

7 - 27IPN 074-237AEIC/5 Operating Manual7.7.4.8 Update Output NameFor each command format the symbol þ represents a blank space. The format is:UOþo

1 - 1IPN 074-237AEIC/5 Operating ManualChapter 1Introduction and Specifications1.1 IntroductionThe IC/5 is a closed loop process controller designe

7 - 28 IPN 074-237AE IC/5 Operating Manual7.7.5 STATUS CommandsStatus commands return pertinent information based on a specific request made. Comman

7 - 29IPN 074-237AEIC/5 Operating Manual5System Messages - Returns a variable length string listing message numbers corresponding to the status mess

7 - 30 IPN 074-237AE IC/5 Operating Manual49 QUICK BUMP50 HALF RATE51 COMPLETE BUMP52 END OF PROCESS53 NO DISK OPTION54 NO DISK IN DRIVE55 DISK IS FU

7 - 31IPN 074-237AEIC/5 Operating Manual201 User Message 2202 User Message 3203 User Message 4204 User Message 5205 User Message 6206 User Message 7

7 - 32 IPN 074-237AE IC/5 Operating Manual12 RATE TOO LOW13 QUICK TUNE FAIL14 HALF RATE FAIL15 COMPLETE TUNE FAIL16 MAX. POWER ERROR17 COMMUNICATIONS

7 - 33IPN 074-237AEIC/5 Operating ManualSLþlayer_status_codeþLayer #These commands are used to determine the condition of started layers. For exampl

7 - 34 IPN 074-237AE IC/5 Operating Manual8RATE RAMP 19 DEPOSIT (between RATE RAMPS 1 & 2)10 RATE RAMP 211 DEPOSIT (after RATE RAMP 2)12 TIME POW

7 - 35IPN 074-237AEIC/5 Operating Manual10 Crystal position. The value of w will be a “G” for a good crystal, an “F” for a failed crystal, an “I” fo

7 - 36 IPN 074-237AE IC/5 Operating Manual23 Timer tick, Sensor Status, Fundamental, and Anharmonic frequencies of active sensors. A negative value o

7 - 37IPN 074-237AEIC/5 Operating Manual27 Timer tick, Sensor Status, Sensor thickness. Eight bytes are returned for the sensor status. Each byte re

1 - 2 IPN 074-237AE IC/5 Operating Manual1.2 Instrument Safety1.2.1 Definition of Notes, Cautions and WarningsWhen using this manual, please pay at

7 - 38 IPN 074-237AE IC/5 Operating Manual7.7.6 REMOTE CommandsRemote commands perform an action based on the specific command given. Commands are p

7 - 39IPN 074-237AEIC/5 Operating Manual10 Battery Backed RAM Lock On -prevents saving of parameters to the nonvolatile RAM. Useful to speed communi

7 - 40 IPN 074-237AE IC/5 Operating ManualRLþchannel_remote_code#þIII#þvalueThese commands are used to affect actions associated with started layers.

7 - 41IPN 074-237AEIC/5 Operating Manual7.7.7 Negative Response Error CodesAn error code in the form of a single ASCII character is returned when a

7 - 42 IPN 074-237AE IC/5 Operating ManualResponse Message - No ChecksumDescription- Process 1 is activeResponse- 1Message Form- (response)<ACK>

7 - 43IPN 074-237AEIC/5 Operating Manual7.8.2 Sample Host ProgramsThe following BASIC programs illustrate host processing that could be used to rem

7 - 44 IPN 074-237AE IC/5 Operating Manual7.8.2.2 Serial Communication with Checksum5 ‘——IC/5 RS-232C COMMUNICATIONS PROGRAM WITH CHECKSUM——10 OPEN

7 - 45IPN 074-237AEIC/5 Operating Manual7.8.2.3 IEEE Sample Host ProgramThis program demonstrates IEEE488 communications with an IC/5. This example

7 - 46 IPN 074-237AE IC/5 Operating Manual'<<<<<<<<<< READ RESPONSE >>>>>>>>>>'

8 - 1IPN 074-237AEIC/5 Operating ManualChapter 8Source/Sensor Set-Up8.1 Source/Sensor Set-Up OverviewThe IC/5 provides the capability to configure

1 - 3IPN 074-237AEIC/5 Operating Manual1.2.2 General Safety InformationWARNING - Risk Of Electric ShockDo not open the instrument case! There are n

8 - 2 IPN 074-237AE IC/5 Operating Manual8.2 Source/Sensor NavigationOnce you are in the Source/Sensor Directory, you may select for configuration a

8 - 3IPN 074-237AEIC/5 Operating Manual8.3 Source ParametersThe following parameters can be displayed for each of the source control channels. DAC

8 - 4 IPN 074-237AE IC/5 Operating ManualCRUCIBLE OUTPUT. . . . . . . . . . . . 0 to 37This parameter designates which of the output relays are to be

8 - 5IPN 074-237AEIC/5 Operating ManualTURRET DELAY . . . . . . . . . . . . . . . 1 to 60 secIf Turret Feedback is not used a timer will be set to

8 - 6 IPN 074-237AE IC/5 Operating Manual8.4 Sensor ParametersThe following entries represent the parameters possible with the standard two sensors.

8 - 7IPN 074-237AEIC/5 Operating ManualXTAL SHUTTER OUTPUT. . . . . . . . 0 to 38This parameter designates which of the 38 outputs is to be used to

8 - 8 IPN 074-237AE IC/5 Operating ManualRECORDER FUNCTIONThis parameter determines the function of the Sensor’s recorder output. Values range from 0

8 - 9IPN 074-237AEIC/5 Operating Manual8.6 Error Messages in Source/Sensor Set-UpBOTH SNSR ON IN MATLShown when attempting to change the Sensor typ

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9 - 1IPN 074-237AEIC/5 Operating ManualChapter 9Utility Set-Up9.1 Utility Set-Up OverviewThe IC/5 provides the capability to modify a series of top

1 - 4 IPN 074-237AE IC/5 Operating Manual1.2.3 Earth GroundThe IC/5 is connected to earth ground through a sealed three-core (three-conductor) power

9 - 2 IPN 074-237AE IC/5 Operating Manual9.2 Utility NavigationSelect a parameter for entry by positioning the box cursor at the desired value follo

9 - 3IPN 074-237AEIC/5 Operating ManualLAYER TO START . . . . . . . . . . . . . . 1 to 250 This selects the starting Layer from the sequence of Laye

9 - 4 IPN 074-237AE IC/5 Operating ManualANALOG DISPLAY . . . . . . . . . . . . . 0/1/2This determines the vertical scale for the graphics display wh

9 - 5IPN 074-237AEIC/5 Operating ManualCAUTIONIf a lock code is not set, that is, if it is set to zero, then powering up and pressing the Clear key

9 - 6 IPN 074-237AE IC/5 Operating ManualFLOPPY DISK ACCESS CODE . . . 1 to 9999, 0The Floppy Disk Access Code allows configuration file retrieval fr

9 - 7IPN 074-237AEIC/5 Operating Manual9.4 Error Messages in Utility Set-UpILLEGAL DATEThe month or day entry is invalid. The month number must be

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10 - 1IPN 074-237AEIC/5 Operating ManualChapter 10Applications10.1 Multiple Sensor Deposition ControlThe conventional method of controlling thin fi

10 - 2 IPN 074-237AE IC/5 Operating ManualFigure 10-1 The Essential Advantage of Multi-Point Deposition Sensing10.1.1 Instrument Parameters and Cor

10 - 3IPN 074-237AEIC/5 Operating ManualIf a sensor fails during deposition, a sudden change in the aggregate rate may occur due to this sensor&apos

1 - 5IPN 074-237AEIC/5 Operating Manual1.2.4 Main Power ConnectionWARNING - Risk Of Electric ShockThis instrument has line voltage present on the p

10 - 4 IPN 074-237AE IC/5 Operating ManualTOOLING: MASTER & SENSORThe tooling factor is now broken into two parts. The MASTER TOOLING located on

10 - 5IPN 074-237AEIC/5 Operating Manual10.2.1 Instrument Parameters Associated with the Trend Analysis FeatureSOURCE DAC OUTPUTThis parameter desi

10 - 6 IPN 074-237AE IC/5 Operating ManualThe I/O capability of the IC/5 can be used to control an entire vacuum deposition system including pump dow

10 - 7IPN 074-237AEIC/5 Operating ManualFigure 10-2 Example System Configuration

10 - 8 IPN 074-237AE IC/5 Operating Manual10.3.1 System Equipment List10.3.1.1 ValvesForeline . . . . . . . . . . . . . . . . . . . . . . An electr

10 - 9IPN 074-237AEIC/5 Operating Manual10.3.1.3 Solenoid ValvesSource ShutterAn electro-pneumatically operated valve which controls the source shu

10 - 10 IPN 074-237AE IC/5 Operating Manual10.3.1.6 Temperature SensorThis sensor provides a contact closure if the sensor's temperature exceed

10 - 11IPN 074-237AEIC/5 Operating ManualWARNING - Risk Of Electric ShockThis example of automated vacuum system and deposition control uses an elec

10 - 12 IPN 074-237AE IC/5 Operating ManualFigure 10-3 User MessagesThese User Messages alert the operator to the status of the Process Cycle. Logic

10 - 13IPN 074-237AEIC/5 Operating Manual5 This input monitors whether the Roughing Valve is closed.6 This input monitors whether the High Vacuum Va

1 - 6 IPN 074-237AE IC/5 Operating Manual1.3 How To Contact Customer SupportWorldwide support information regarding: Technical Support, to contact

10 - 14 IPN 074-237AE IC/5 Operating ManualThis display is used to assign alphanumeric names to the various Outputs and Inputs connected to I/O Board

10 - 15IPN 074-237AEIC/5 Operating Manual10.3.2.3 Logic Statement DirectoryThe Logic Statements are broken down into 3 sections. The first section,

10 - 16 IPN 074-237AE IC/5 Operating ManualFigure 10-8 Statement 3Statement 3 monitors if Timer 1 is expired and if the Roughing Valve is closed. Ti

10 - 17IPN 074-237AEIC/5 Operating ManualFigure 10-12 Statement 7This statement monitors the Evacuate Chamber input and the status of Timer 8. Time

10 - 18 IPN 074-237AE IC/5 Operating ManualStatement 10 is also tied to Statement 7 by its dependency on Timer 3. This is done to ensure that Stateme

10 - 19IPN 074-237AEIC/5 Operating ManualFigure 10-19 Statements 14 and 15Statements 14 and 15 are designed to keep the Ion Gauge emission turned o

10 - 20 IPN 074-237AE IC/5 Operating ManualStatement 19 allows intervention to Abort automatic process control if desired. By its dependence on Timer

10 - 21IPN 074-237AEIC/5 Operating ManualFigure 10-27 Statement 23This Statement monitors the Alarm Answered input. Once the Abort input is activat

10 - 22 IPN 074-237AE IC/5 Operating ManualFigure 10-31 Statement 27Statement 36 monitors the same conditions as Statement 17. Whereas Statement 17

10 - 23IPN 074-237AEIC/5 Operating Manualdelay between turning the electron beam gun filament voltage on and turning the electron beam gun high volt

1 - 7IPN 074-237AEIC/5 Operating Manual1.4 IC/5 Specifications1.4.1 MeasurementCrystal Frequency . . . . . . . . . . . . . . 6.0 MHz (new crystal

10 - 24 IPN 074-237AE IC/5 Operating ManualFigure 10-38 Statement 34Statement 34 monitors for the same conditions as Statement 35 and turns off the

10 - 25IPN 074-237AEIC/5 Operating Manualvalve. Canceling these timers ensures those statements dependent on these timers will not evaluate true if

10 - 26 IPN 074-237AE IC/5 Operating ManualStatement 30 monitors the Deposition Pressure OK input, makes sure that the IC/5 is in the READY state, th

11 - 1IPN 074-237AEIC/5 Operating ManualChapter 11Installation and Interfaces11.1 Location GuidelinesBefore you permanently install this controller

11 - 2 IPN 074-237AE IC/5 Operating ManualNOTE: Do not allow water tubes to freeze. This may happen if the tubes pass through a cryogenic shroud and

11 - 3IPN 074-237AEIC/5 Operating Manual11.1.2 Sensor InstallationFigure 11-1 shows a typical installation of an INFICON water cooled crystal senso

11 - 4 IPN 074-237AE IC/5 Operating ManualGenerally, install the sensor as far as possible from the evaporation source (a minimum of 10" [25.4 c

11 - 5IPN 074-237AEIC/5 Operating Manual11.1.3 Control Unit InstallationThe control unit is designed to be rack mounted. It may be also used on a t

11 - 6 IPN 074-237AE IC/5 Operating Manual11.2.2 Connections to Earth GroundThere are two earth connectors: The ground connection on the controller

11 - 7IPN 074-237AEIC/5 Operating ManualIn many cases, a braided ground strap is sufficient. However, there are cases when a solid copper strap (0.0

1 - 8 IPN 074-237AE IC/5 Operating Manual1.4.3 Set-Up Parameters# of Processes . . . . . . . . . . . . . . . . . 50# of Layers . . . . . . . . . . .

11 - 8 IPN 074-237AE IC/5 Operating Manual11.3 Connecting the ControllerThe operation of the controller depends on the proper connection of power an

11 - 9IPN 074-237AEIC/5 Operating ManualIf the nominal line voltage is 230 V(ac), use the 240 V(ac) nominal setting whose input range includes 230 V

11 - 10 IPN 074-237AE IC/5 Operating ManualFigure 11-4 Voltage Selector Drum and Fuse11.3.3 Routing XIU CablesXIU cables, IPN 600-1039-Gxx, are ava

11 - 11IPN 074-237AEIC/5 Operating Manual11.3.4.2 Input/Relay Module ConnectionsThe Input/Relay module, IPN 760-162-G1, is included as standard equ

11 - 12 IPN 074-237AE IC/5 Operating ManualTable 11-3 Input/Relay Pin ConnectionsI/O Board #1 I/O Board #2Relay # Pins TTLInput #Pin Relay # Pins TT

11 - 13IPN 074-237AEIC/5 Operating Manual11.3.4.3 RS-232C CommunicationsRS-232C serial communications is included in the controller as standard equ

11 - 14 IPN 074-237AE IC/5 Operating Manual11.3.4.4 Isolated +24 V(dc) SupplyAn isolated +24 V(dc) power supply is available on a 9-pin D-Sub connec

12 - 1IPN 074-237AEIC/5 Operating ManualChapter 12Calibration Procedures12.1 Importance of Density, Tooling and Z-ratioThe quartz crystal microbala

12 - 2 IPN 074-237AE IC/5 Operating Manual[1]where:D1 = Initial density settingTx = Thickness reading on IC/5Tm = Measured thickness7 A quick check o

12 - 3IPN 074-237AEIC/5 Operating Manual12.4 Laboratory Determination of Z-ratioNOTE: On the IC/5, the Auto Z function is available to automaticall

1 - 9IPN 074-237AEIC/5 Operating ManualFeed Ramps. . . . . . . . . . . . . . . . . . . 1 per materialFeed Power . . . . . . . . . . . . . . . . 0.0

12 - 4 IPN 074-237AE IC/5 Operating Manual6 Using the density value from step 1 and the recorded values for Fco and Fc, adjust the Z-Ratio value in t

12 - 5IPN 074-237AEIC/5 Operating ManualCalibration Thickness (CALThick) values must be determined for each sensor, for each material used in the co

12 - 6 IPN 074-237AE IC/5 Operating ManualEnter CAL Thick values for material B (either automatically or manually)Sens 1 Sens 2 Sens 3 Sens 4CAL Thic

12 - 7IPN 074-237AEIC/5 Operating ManualFigure 12-1 Cross Talk Calibration12.5.1.1 Cross Talk Calibrate ParametersMATERIAL INDEX. . . . . . . . .

12 - 8 IPN 074-237AE IC/5 Operating Manual12.5.1.1.1 Function Key Selection Choices for Cross Talk Calibration Setup12.5.2 Cross Talk Calibration M

12 - 9IPN 074-237AEIC/5 Operating Manual12.5.3 Cross Talk Calibration CALIBRATE displayUpon entering this display the thickness values are zeroed a

12 - 10 IPN 074-237AE IC/5 Operating Manual12.5.4.1 Function Key Selection Choices for Cross Talk Calibration Select12.5.5 Cross Talk Calibration P

12 - 11IPN 074-237AEIC/5 Operating Manual12.6 AutoTuningThe AutoTune feature of the IC/5 is used to automatically characterize the response of a sy

12 - 12 IPN 074-237AE IC/5 Operating ManualFigure 12-3 AutoTune Parameters Display12.6.1 AutoTune ParametersRefer to Sections section 2.1.7 on page

12 - 13IPN 074-237AEIC/5 Operating ManualCONTROL LOOPThis is a read-only parameter that indicates the type of control loop specified during material

1 - 10 IPN 074-237AE IC/5 Operating Manual1.4.4 DisplayType/Color/Size . . . . . . . . . . . . . . . . CRT/ Amber/ 5" H x 9" WFormat . . .

12 - 14 IPN 074-237AE IC/5 Operating Manual12.6.3 AutoTune Tuning Display and AutoTune DescriptionThe AutoTune Tuning display is entered from the Au

12 - 15IPN 074-237AEIC/5 Operating Manualduring any one of these power increments then the rate transition for this pre-determined power increment i

12 - 16 IPN 074-237AE IC/5 Operating ManualComplete Bump 1. . . . . . . . . . . . . . The first increase of source power level. It is used to determi

12 - 17IPN 074-237AEIC/5 Operating ManualSTOP Max Rate Exceeded . . . . . . . Indicates that tuning has stopped because the MAXIMUM RATE parameter w

12 - 18 IPN 074-237AE IC/5 Operating Manual7 When AutoTune is completed the instrument will automatically return to the AutoTune Parameters display a

13 - 1IPN 074-237AEIC/5 Operating ManualChapter 13Troubleshooting, Status and Error Messages13.1 Status and Error MessagesAUTOTUNE FAILUREThis mess

13 - 2 IPN 074-237AE IC/5 Operating ManualCANNOT ROTATE DUALThe rotate crystal function can only be performed on a CrystalSix sensor head.CANNOT TOGG

13 - 3IPN 074-237AEIC/5 Operating ManualEDIT IN PROGRESSThe I/O Map or the User Messages displays cannot be exited while an edit name or edit messag

13 - 4 IPN 074-237AE IC/5 Operating ManualILLEGAL DATEThe month or day entry is invalid. Month numbers must be in the 01 to 12 range; day numbers mus

13 - 5IPN 074-237AEIC/5 Operating ManualMAX POWER REACHED 1 (2)Indicates the specified maximum power has been reached on an active source in the pri

1 - 11IPN 074-237AEIC/5 Operating Manual1.4.5 Source / Recorder OutputsQuantity . . . . . . . . . . . . . . . . . . . . . . 6 BNCConfiguration .

13 - 6 IPN 074-237AE IC/5 Operating ManualNO SWITCH: NO OUTPUTA crystal switch cannot be done because no output was set for crystal switching in the

13 - 7IPN 074-237AEIC/5 Operating ManualQUICK BUMP #Indicates the number of the AutoTune source power change used to measure the system response cha

13 - 8 IPN 074-237AE IC/5 Operating ManualSTOP - COMPLETE TUNE FAILIndicates the complete tune portion of AutoTune did not determine reliable system

13 - 9IPN 074-237AEIC/5 Operating ManualSTOP - SENSOR CONFLICTIndicates the instrument is stopped because the process is trying to enter the DEPOSIT

13 - 10 IPN 074-237AE IC/5 Operating ManualUNABLE TO AUTO Z #Indicates the requested Auto Z measurement cannot be completed due to the crystal condit

13 - 11IPN 074-237AEIC/5 Operating Manual13.2 Troubleshooting GuideIf the instrument fails to work, or appears to have diminished performance, the

13 - 12 IPN 074-237AE IC/5 Operating Manual13.2.1 Major Instrument Components and AssembliesMONITOR KIT750-402POWER SUPPLY760-211-G1, 2, 3, 4CRT / M

13 - 13IPN 074-237AEIC/5 Operating Manual13.2.2 Troubleshooting the InstrumentTable 13-1 Troubleshooting the InstrumentSYMPTOM CAUSE REMEDY1. powe

13 - 14 IPN 074-237AE IC/5 Operating Manual5. all keys on the front panel fail to functiona. instrument is "locked" up a. turn power to OFF

13 - 15IPN 074-237AEIC/5 Operating Manual13.2.3 Troubleshooting Transducers/SensorsNOTE: Many sensor head problems may be diagnosed with a (Digital

1 - 12 IPN 074-237AE IC/5 Operating Manual1.4.6 Logic ProcessingType . . . . . . . . . . . . . . . . . . . . . . . . . If/Then statements Logical Fu

13 - 16 IPN 074-237AE IC/5 Operating ManualNOTE: A more detailed troubleshooting guide is shipped with the sensor. Refer to that manual for more deta

13 - 17IPN 074-237AEIC/5 Operating Manual2. crystal ceases to oscillate during deposition before it reaches its "normal" lifea. crystal st

13 - 18 IPN 074-237AE IC/5 Operating Manual4. crystal oscillates in vacuum but stops oscillation after open to aira. crystal was near the end of its

13 - 19IPN 074-237AEIC/5 Operating Manual6. poor thickness reproducibilitya. variable source flux distributiona. move sensor to a more central locat

13 - 20 IPN 074-237AE IC/5 Operating Manual13.2.4 Troubleshooting Computer Communications8. CrystalSix, crystal switch problem (does not advance or

13 - 21IPN 074-237AEIC/5 Operating Manual2. error code returned a. A = illegal command a. the command sent was not valid; verify command syntax as s

13 - 22 IPN 074-237AE IC/5 Operating Manualf. F = cannot change value nowf. the command sent is for a parameter that cannot be changed while the inst

13 - 23IPN 074-237AEIC/5 Operating Manual13.3 Replacing the CrystalThe procedure for replacing the crystal is basically the same with all transduce

13 - 24 IPN 074-237AE IC/5 Operating ManualFigure 13-1 Standard Crystal Sensor (Exploded)13.3.2 Shuttered and Dual SensorsThere is no difference in

13 - 25IPN 074-237AEIC/5 Operating Manual13.3.3 Bakeable SensorFor the Bakeable sensor, the procedure is the same as the regular crystal except tha

1 - 13IPN 074-237AEIC/5 Operating Manual1.4.8 Remote CommunicationsRS232C Serial Port . . . . . . . . . . . . . Standard; INFICON protocolBaud Rat

13 - 26 IPN 074-237AE IC/5 Operating Manual13.3.4 Sputtering SensorObserve the general precautions for replacing crystals and follow the instruction

13 - 27IPN 074-237AEIC/5 Operating Manual13.3.5 Crystal SnatcherUse the crystal snatcher, supplied with the sensor, as follows:1 Insert crystal sna

13 - 28 IPN 074-237AE IC/5 Operating Manual13.4 Crystal Sensor EmulatorIPN 760-601-G1 or 760-601-G2NOTE: Crystal Sensor Emulator 760-601-G1 (obsolet

13 - 29IPN 074-237AEIC/5 Operating Manual13.4.1 Diagnostic ProceduresThe following diagnostic procedures employ the Crystal Sensor Emulator to anal

13 - 30 IPN 074-237AE IC/5 Operating Manual13.4.1.2 Feed-Through Or In-Vacuum Cable Diagnostic Procedure1 Refer to Figure 13-6 on page 13-28. Remove

13 - 31IPN 074-237AEIC/5 Operating Manual11 Connect the six-inch BNC cable to the Feed-Through and disconnect it from the Crystal Interface Unit (or

13 - 32 IPN 074-237AE IC/5 Operating Manual5 Connect the In-Vacuum Cable to the Sensor Head.  Verify there is continuity (<0.2 ohm) from the fing

13 - 33IPN 074-237AEIC/5 Operating Manual13.4.3 Sensor Cover ConnectionThe Crystal Sensor Emulator can be used to verify the measurement system for

13 - 34 IPN 074-237AE IC/5 Operating Manual13.4.4 SpecificationsDimensions1.58 in. diameter x 1.79 in.(40.13 mm diameter x 45.47 mm)Temperature Rang

A - 1IPN 074-237AEIC/5 Operating ManualAppendix AMaterial TableA.1 IntroductionThe following table represents the content of the instrument's

www.inficon.com [email protected] to our continuing program of product improvements, specifications are subject to change without notice.©20

1 - 14 IPN 074-237AE IC/5 Operating Manual1.4.11 Operating EnvironmentUsage. . . . . . . . . . . . . . . . . . . . . . . . Indoor onlyTemperature .

A - 2 IPN 074-237AE IC/5 Operating Manual17 BaF24.886 0.793 Barium Fluoride18 BaN2O63.244 1.261 Barium Nitrate19 BaO 5.720 *1.000 Barium Oxide20 BaTi

A - 3IPN 074-237AEIC/5 Operating Manual50 Co 8.900 0.343 Cobalt51 CoO 6.440 0.412 Cobalt Oxide52 Cr 7.200 0.305 Chromium53 Cr2O35.210 *1.000 Chromiu

A - 4 IPN 074-237AE IC/5 Operating Manual83 Gd2O37.410 *1.000 Gadolinium Oxide84 Ge 5.350 0.516 Germanium85 Ge3N25.200 *1.000 Germanium Nitride86 GeO

A - 5IPN 074-237AEIC/5 Operating Manual116 LiF 2.638 0.778 Lithium Fluoride117 LiNbO34.700 0.463 Lithium Niobate118 Lu 9.840 *1.000 Lutetium119 Mg 1

A - 6 IPN 074-237AE IC/5 Operating Manual149 Ni 8.910 0.331 Nickel150 NiCr 8.500 *1.000 Nichrome151 NiCrFe 8.500 *1.000 Inconel152 NiFe 8.700 *1.000

A - 7IPN 074-237AEIC/5 Operating Manual182 Sc2O33.860 *1.000 Scandium Oxide183 Se 4.810 0.864 Selenium184 Si 2.320 0.712 Silicon185 Si3N43.440 *1.00

A - 8 IPN 074-237AE IC/5 Operating Manual215 TiC 4.930 *1.000 Titanium Carbide216 TiN 5.430 *1.000 Titanium Nitride217 TiO 4.900 *1.000 Titanium Oxid

A - 9IPN 074-237AEIC/5 Operating Manual248 ZnSe 5.260 0.722 Zinc Selenide249 ZnTe 6.340 0.770 Zinc Telluride250 Zr 6.490 0.600 Zirconium251 ZrB26.08

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Index - 1IPN 074-237AEIC/5 Operating ManualIndexAabort 10-20acoustic impedance 2-9active oscillator 2-6, 2-8Activity 3-15aerial mass density 2-10agg

1 - 15IPN 074-237AEIC/5 Operating Manual1.5 Unpacking and Inspection1 If the IC/5 control unit has not been removed from its shipping container, do

Index - 2 IPN 074-237AE IC/5 Operating Manualfloppy disk 6-19, 9-6access code 3-40drive 3-39foreline valve 10-16Frequency Response Method 2-12fundame

Index - 3IPN 074-237AEIC/5 Operating Manualsource 4-5channel configuration 8-2control 3-34, 8-1slow 2-11spattering 11-4spreadsheet program 3-42spuri

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1 - 16 IPN 074-237AE IC/5 Operating Manual1.6.2 Pre-installed Options or SparesAdditional Sensor Module . . . . . . . . 760-1132-G1 (up to 3 extra)

1 - 17IPN 074-237AEIC/5 Operating ManualAdapter CablesIC/5 to IC/4 Kit . . . . . . . . . . . . . . 600-1084-P1 (Relays and Inputs - for IC/4 or IC/

1 - 18 IPN 074-237AE IC/5 Operating Manual1.7 Initial Power-On VerificationA preliminary functional check of the instrument can be made before forma

1 - 19IPN 074-237AEIC/5 Operating Manual1 Confirm that AC line voltage is supplied and proper for the instrument. Line voltage should be indicated o

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2 - 1IPN 074-237AEIC/5 Operating ManualChapter 2Measurement and Control Theory2.1 BasicsThe Quartz Crystal deposition Monitor, or QCM, utilizes the

2 - 2 IPN 074-237AE IC/5 Operating Manualmeasurement of the crystal’s frequency shift. The quantitative knowledge of this effect provides a means of

2 - 3IPN 074-237AEIC/5 Operating Manualcrystal to a holder and not produce any undesirable effects. Contouring also reduces the intensity of respons

TrademarksThe trademarks of the products mentioned in this Operating Manual are held by the companies that produce them.INFICON® is a trademark of INF

2 - 4 IPN 074-237AE IC/5 Operating ManualFigure 2-3 Thickness Shear Displacement2.1.2 Period Measurement TechniqueAlthough instruments using equati

2 - 5IPN 074-237AEIC/5 Operating Manualmonitor crystal’s period is (n/Fr)/m where n is the number of counts in the second accumulator. The precision

2 - 6 IPN 074-237AE IC/5 Operating Manualfor a number of materials, and has been found to be valid for frequency shifts equivalent to Ff = 0.4Fq. Kee

2 - 7IPN 074-237AEIC/5 Operating Manualinto a greater frequency shift than that which would be produced with a new crystal. In the extreme, the basi

2 - 8 IPN 074-237AE IC/5 Operating Manualmeasurement system uses the phase/frequency properties of the quartz crystal to determine the resonant frequ

2 - 9IPN 074-237AEIC/5 Operating Manualfundamental mode continuously, but also it can be implemented to alternate between one or more other modes. T

2 - 10 IPN 074-237AE IC/5 Operating Manualassignment refer to the number of phase reversals in the wave motion along the three axes of the crystal. T

2 - 11IPN 074-237AEIC/5 Operating ManualNeedless to say, similar errors occur with the Z-match™ technique under similar circumstances. However, the

2 - 12 IPN 074-237AE IC/5 Operating ManualTechniques for calculating optimum source control parameters can be classified by the type of data used for

2 - 13IPN 074-237AEIC/5 Operating ManualFigure 2-7 Response of Process To An Open Loop Step Change (At t=0 Control Signal is Increased)A controller

DECLARATION OFCONFORMITYThis is to certify that this equipment, designed and manufactured by:INFICON Inc.2 Technology PlaceEast Syracuse, NY

2 - 14 IPN 074-237AE IC/5 Operating ManualFigure 2-8 PID Controller Block DiagramThe key to using any control system is to choose the proper values

2 - 15IPN 074-237AEIC/5 Operating ManualITAE is insensitive to the initial and somewhat unavoidable errors, but it will weight heavily any errors oc

2 - 16 IPN 074-237AE IC/5 Operating Manualtowards zero error. This technique works well when there is little or no dead time. If this technique is us

3 - 1IPN 074-237AEIC/5 Operating ManualChapter 3Operation3.1 Front Panel ControlsOperational controls for the IC/5 are located on the front panel o

3 - 2 IPN 074-237AE IC/5 Operating Manual4 System SwitchesAn array of three keys that provide START, STOP and RESET functions, for process control. S

3 - 3IPN 074-237AEIC/5 Operating Manual3.2 Rear Panel InterfacesInterfaces for the IC/5 are located on the rear panel of the instrument as depicted

3 - 4 IPN 074-237AE IC/5 Operating Manual8 8 Relay x 14 Output I/O Card (optional)Provides pin connection for 8 relays rated for 30 V(dc) or 30 V(ac)

3 - 5IPN 074-237AEIC/5 Operating Manual3.3 DisplaysThe IC/5 has many display screens for monitoring and programming processes. The four main types

3 - 6 IPN 074-237AE IC/5 Operating ManualFigure 3-3 Display Hierarchy - ProgramPROGRAMMATERIALDIRECTORYPROCESSDIRECTORYI/OSOURCE/SENSORDIRECTORYUtil

3 - 7IPN 074-237AEIC/5 Operating ManualFigure 3-4 Display Hierarchy - OperateOPERATECRYSTAL ROTATE TESTSENSORSXIU(F1) (F2) (F3)RS232TESTSYSTEMSTATU

3 - 8 IPN 074-237AE IC/5 Operating Manual3.3.1 Display Navigation via the MENU TREEPress the MENU key on the front panel to access the MENU TREE. (S

3 - 9IPN 074-237AEIC/5 Operating ManualYou can move to any of the instrument’s displays by positioning the cursor at the desired display and pressin

3 - 10 IPN 074-237AE IC/5 Operating ManualFigure 3-6 Operate DisplayOperate Display Description1 Layer Currently In Process2 Layer Timer3 Material

3 - 11IPN 074-237AEIC/5 Operating ManualDuring the OPERATE display, the function keys along the right side of the screen will function as explained

3 - 12 IPN 074-237AE IC/5 Operating ManualFigure 3-7 Co-deposition Operate Display3.3.2.1 Crystal Life and Starting FrequencyOn the SENSORS display

3 - 13IPN 074-237AEIC/5 Operating Manualwhich covered the crystal life range in question. Results indicate that a brand new crystal that indicates 3

3 - 14 IPN 074-237AE IC/5 Operating Manual3 XTAL POSITIONSThis field is subdivided into three categories; current position (CURR), next position (NEX

3 - 15IPN 074-237AEIC/5 Operating Manual7XTALThis field is subdivided into two categories. The first category, LIFE displays the crystal life. The I

3 - 16 IPN 074-237AE IC/5 Operating Manual3.3.3.2 Function Key Selection Choices for the Sensors DisplayF1 CRYSTAL SWITCHTo initiate a crystal switc

3 - 17IPN 074-237AEIC/5 Operating Manual3.3.4 Maintenance/Diagnostics DisplayThese displays provide a simple method for system maintenance and diag

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the

3 - 18 IPN 074-237AE IC/5 Operating Manual3.3.5 Source Maintenance DisplayFigure 3-10 Source Maintenance Display3.3.5.1 Function Key Selection Cho

3 - 19IPN 074-237AEIC/5 Operating Manual3.3.6 Cross Talk and Calibration DisplayCross talk calibration is used during co-deposition to correct for

3 - 20 IPN 074-237AE IC/5 Operating Manual3.3.7 Program DisplaysProgram displays allow you to program processes and system configuration. Each progr

3 - 21IPN 074-237AEIC/5 Operating ManualFigure 3-13 I/O DisplayLOGIC STATEMENT DIRECTORY: Provides a display that facilitates selection of Logic st

3 - 22 IPN 074-237AE IC/5 Operating Manual3.4 Process DescriptionThe IC/5 allows the user to control deposition of a sequential series of single lay

3 - 23IPN 074-237AEIC/5 Operating Manual5 Define layer/process.To define layers and processes, the PROCESS displays are used. A process is an ordere

3 - 24 IPN 074-237AE IC/5 Operating ManualFigure 3-14 Process State Diagram1 Make sure the instrument is in READY. If not, press STOP then RESET.2 P

3 - 25IPN 074-237AEIC/5 Operating Manual3.4.3 Pre-conditioning a LayerIt may be desirable to prepare a layer for deposition while the previous laye

3 - 26 IPN 074-237AE IC/5 Operating Manual3.4.4 Co-depositionOn the IC/5 it is possible to execute two layers simultaneously. A co-deposition is def

3 - 27IPN 074-237AEIC/5 Operating Manual3.4.5 Automating a ProcessA process can be automated so that a complete process can be executed without hav

3 - 28 IPN 074-237AE IC/5 Operating ManualFigure 3-15 State Sequence Diagram - Part A

3 - 29IPN 074-237AEIC/5 Operating ManualFigure 3-16 State Sequence Diagram - Part B

3 - 30 IPN 074-237AE IC/5 Operating Manual3.5 State DescriptionsTable 3-3 State DescriptionsSTATE CONDITION RELAY CONTACT STATUSNOTE: 1 through 7 a

3 - 31IPN 074-237AEIC/5 Operating Manual12. RATE RAMP TIME 2 Rate control, desired rate changing. [New Rate 2, Start Ramp 2, Ramp Time 2]Active Acti

3 - 32 IPN 074-237AE IC/5 Operating Manual3.6 Special FeaturesThe IC/5 has several special features to enhance the performance of the instrument.3.6

3 - 33IPN 074-237AEIC/5 Operating Manual3.6.1.1 CrystalSix Position SelectUsed in conjunction with the position-select CrystalSix sensor (IPN 750-4

3 - 34 IPN 074-237AE IC/5 Operating Manual3.6.2 Source/Crucible SelectionThe IC/5 can control a source with up to 64 crucibles, through up to six bi

3 - 35IPN 074-237AEIC/5 Operating Manual3 Select the Crucible Output Type as normally open (NO), or normally closed (NC).Example:Number of crucibles

3 - 36 IPN 074-237AE IC/5 Operating Manual3.6.3 Auto ZThe Auto Z feature of the IC/5 automatically determines the Z-ratio of a crystal. This feature

3 - 37IPN 074-237AEIC/5 Operating Manual4 Unable to detect anharmonic frequency. As mass is deposited onto the crystal, the oscillation is damped. T

TOC - 1IPN 074-237AEIC/5 Operating ManualTable Of ContentsChapter 1Introduction and Specifications1.1 Introduction. . . . . . . . . . . . . . . . .

3 - 38 IPN 074-237AE IC/5 Operating Manual3.6.6 Hand-Held ControllerA Hand-Held Controller, see Figure 3-17, is provided as an accessory with the IC

3 - 39IPN 074-237AEIC/5 Operating Manual3.6.7 Test ModeThis instrument contains a software-controlled test mode which simulates actual operation. O

3 - 40 IPN 074-237AE IC/5 Operating ManualNOTE: A floppy disk access code is enabled when the instrument has a program lock code set. By entering a f

3 - 41IPN 074-237AEIC/5 Operating ManualDATE: MMDDYYYYTIME: XX:XXPROCESS #1: ##RUN #: ###LAYER #: ###MATERIAL NAME: NNN#MM#PROCESS TIME XX:XXLAYER T

3 - 42 IPN 074-237AE IC/5 Operating ManualIf two layers are co-deposited, the first layer to have a source shutter close will be data-logged first.Th

4 - 1IPN 074-237AEIC/5 Operating ManualChapter 4Material Set Up4.1 Material Set Up OverviewThe IC/5 can store the definition parameters for up to 2

4 - 2 IPN 074-237AE IC/5 Operating ManualFigure 4-2 Material DirectoryA previously defined material can be deleted provided it is not referenced in

4 - 3IPN 074-237AEIC/5 Operating ManualmFigure 4-4 Material Definition (Page 1)Table 4-1 Function Key Selection Choices For Material LibraryKey Fu

4 - 4 IPN 074-237AE IC/5 Operating ManualFigure 4-5 Material Definition (Page 2)Figure 4-6 Material Definition (Page 3)

4 - 5IPN 074-237AEIC/5 Operating Manual4.3 Material Definition ParametersRate Avg. and Thickness values are shown on Material definition page 3, fo