Inficon PSG512-S Pirani Standard Gauge Bedienungsanleitung PDF herunterladen

Pirani Standard Gauge

PSG500/-S, PSG502-S,

PSG510-S, PSG512-S

Operating Manual

Incl. EC Declaration of Conformity

tina44e1-g (2010-06)

Product Identification

In all communications with INFICON, please specify the in-

formation on the product nameplate. For convenient refe-

rence copy that information into the space provided below.

Model:

PN:

SN:

V W

INFICON AG, LI-9496 Balzers

Validity

This document applies to products with the following part

numbers:

PSG500 PSG500-S (

W filament)

350-060 350-080

(DN 16 ISO-KF)

350-062 350-082

(DN 16 CF-R)

350-061 350-081

(1/8" NPT)

350-064 350-084

(8 VCR

)

350-065 350-085

(4 VCR

)

350-063 350-083

(½"-Rohr)

350-066 350-086

(7/16-20 UNF)

350-067 350-087

(DN 16 ISO-KF long tube)

350-068 350-088

(DN 16 CF-R long tube)

PSG502-S (Ni filament)

350-140

(DN 16 ISO-KF)

350-142

(DN 16 CF-R)

350-141

(1/8" NPT)

350-144

(8 VCR

)

350-145

(4 VCR

)

350-143

(½"-Rohr)

350-146

(7/16-20 UNF)

350-147

(DN 16 ISO-KF long tube)

350-148

(DN 16 CF-R long tube)

PSG510-S (W filament) PSG512-S (Ni filament)

350-200

(DN 16 ISO-KF) 350-300 (DN 16 ISO-KF)

The part number (PN) can be taken from the product name-

plate.

If not indicated otherwise in the legends, the illustrations in

this document correspond to the gauge with part number

350 060. They apply to gauges with other part numbers by

analogy.

We reserve the right to make technical changes without prior

notice.

All dimensions in mm.

Intended Use

The Pirani Standard Gauges PSG500/-S, PSG502-S,

PSG510-S, PSG512-S have been designed for vacuum

measurement of gases in the pressure range of

5×10

-4

… 1000 mbar.

They must not be used for measuring flammable or combus-

tible gases in mixtures containing oxidants (e.g. atmospheric

oxygen) within the explosion range.

They can be operated in connection with an INFICON con-

troller or with another controller.

Trademark

VCR

Swagelok Marketing Co.

Safety

Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and envi-

ronmental damage.

Caution

Information on correct handling or use. Disregard can lead

to malfunctions or minor equipment damage.

Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out

by persons who have suitable technical training and the

necessary experience or who have been instructed by the

end-user of the product.

General Safety Instructions

• Adhere to the applicable regulations and take the nec-

essary precautions for the process media used.

Consider possible reactions between the materials and the

process media.

Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

• Adhere to the applicable regulations and take the neces-

sary precautions for all work you are going to do and con-

sider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum

components are contaminated. Adhere to the relevant re-

gulations and take the necessary precautions when hand-

ling contaminated parts.

Communicate the safety instructions to all other users.

Liability and Warranty

INFICON assumes no liability and the warranty becomes null

and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations

etc.) on the product

• use the product with accessories not listed in the product

documentation.

The end-user assumes the responsibility in conjunction with

the process media used.

Gauge failures due to contamination or wear and tear, as well

as expendable parts (filament), are not covered by the

warranty.

Technical Data

Measurement principle thermal conductance according

to Pirani

Measurement range

(air, O

, CO, N

)

5×10

-4

… 1000 mbar

Accuracy (N

)

1×10

-3

… 100 mbar ±15% of reading

5×10

-4

… 1×10

-3

mbar ±50% of reading

100 … 1000 mbar ±50% of reading

Resolution 1% of reading

Repeatability

1×10

-3

… 100 mbar 2% of reading

Output signal (measure-

ment signal)

Voltage range VDC 0 … +10.3

Measurement range VDC +1.9 … +10.0

Voltage vs. pressure logarithmic

1.286 V/decade

Error signal

Filament rupture

0 … +0.5

+0.1

Output impedance

2×4.7

Minimum loaded imped-

ance

kΩ

10, short-circuit proof

Response time ms 80

Gauge identification

27.0 kΩ, referenced to supply

common (voltage at pin 4 ≤5 V)

Adjustment one tactile switch for ATM and

HV adjustment

Switching functions SP1, SP2

Threshold value indi-

cation and setting

one tactile switch at measure-

ment value output. Press briefly

for threshold indication. Keep

pressing or press repeatedly for

threshold setting.

Setting range 2×10

-3

… 500 mbar

Hysteresis 10% above lower threshold

Relay contact

closed

open

30 V, 0.5 ADC, floating

at low pressure (lamp is lit)

at high pressure, error, missing

supply

Supply

DANGER

The gauge may only be connected to power sup-

plies, instruments or control devices that conform

to the requirements of a grounded extra-low vol-

tage (SELV). The connection to the gauge has to

be fused

Supply voltage

At gauge VDC +14 … +30

Ripple V

≤1

Current consumption mA <500

(max. starting current)

Power consumption W ≤1

Fuse required

(slow)

Electrical connection FCC 68 / RJ45 appliance

connector, 8 poles, male

Sensor cable 8 poles plus shielding

Cable length ≤100 m (8×0.14 mm

)

Grounding concept

→ "Electrical Connection"

Vacuum connection to

signal common

connected via 1 MΩ

(voltage difference <15 V)

Supply common to

signal common

conducted separately, for

differential measurement

Materials exposed to

vacuum

PSG500/-S, PSG502-S

DIN 1.4301, DIN 1.4305,

DIN 1.4435, glass, Ni,

NiFe

PSG510-S,

PSG512-S

(ceramics), Ni,

DIN 1.4435, DIN 1.4305

DIN 1.3981

Filament

PSG500/-S, PSG510-S

PSG502-S, PSG512-S

INFICON controllers fulfill these requirements.

1 2 3 4

Inhaltsverzeichnis

Seite 1 - Pirani Standard Gauge

Pirani Standard Gauge PSG500/-S, PSG502-S, PSG510-S, PSG512-S Operating Manual Incl. EC Declaration of Conformity tina44e1-g (2010-06) Pr

Seite 2 - Installation

Internal volume DN 16 ISO-KF DN 16 CF-R 1/8" NPT 8 VCR® 4 VCR® ½"-Rohr 7/16-20 UNF cm3 cm3 cm3 cm3 cm3 cm3 cm3 ≈1.5 ≈1.5 ≈2 ≈2 ≈2 ≈2 ≈1.

Seite 3 - Switching Functions

Electrical Connection Make sure the vacuum connection is properly made (→ "Vacuum Connection").  If no sensor cable is available, mak

Seite 4 - 1 copy for file of sender

Spare Parts When ordering spare parts, always indicate: • all information on the product nameplate • description and ordering number according to

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Inficon PSG512-S Pirani Standard Gauge Bedienungsanleitung

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