Inficon SKY CDG100D 0.1 ... 1000 Torr / mbar Bedienungsanleitung

tina52e1-d (2014-02) 1 Capacitance Diaphragm Gauge CDG100D Operating Manual Incl. EC Declaration of Conformity

10 tina52e1-d (2014-02) 2 Technical Data For further technical data for gauges with DeviceNet, Profibus or EtherCAT interface →  [5], [6], [

tina52e1-d (2014-02) 11 Remote Zero Adjust External switching contact digital input for zero adjust-ment (→  25) 30 V (dc) / <5 mA (dc) S

12 tina52e1-d (2014-02) Supply DANGER The gauge may only be connected to power sup-plies, instruments or control devices that conform to the re

tina52e1-d (2014-02) 13 Grounding concept → "Power Connection" Materials exposed to vacuum ceramics (Al2O3 ≥99.5%), stainless steel

14 tina52e1-d (2014-02) Dimensions [mm] 8-VCR longfemale54.1 8-VCR female31.531.5DN 16 ISO-KF31.5DN 16 CF-R31.5OD½"1382110.4 3.8 Weight

tina52e1-d (2014-02) 15 Analog Measurement Signal vs. Pressure 12 34567891000.9×F.S.0.5×F.S.0.6×F.S.1.0×F.S.0.7×F.S.0.8×F.S.0.1×F.S.0.2×F.S.0.

16 tina52e1-d (2014-02) 3 Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the produ

tina52e1-d (2014-02) 17 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the

18 tina52e1-d (2014-02) Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation. To keep conden-sates and par

tina52e1-d (2014-02) 19  Mount the insulation shell. Insulation shell

2 tina52e1-d (2014-02) Product Identification In all communications with INFICON, please specify the infor-mation given on the product nameplat

20 tina52e1-d (2014-02) 3.2 Power Connection Make sure the vacuum connection is properly made (→  16). DANGER The gauge may only be connec

tina52e1-d (2014-02) 21 3.2.1 D-Sub, 9-pin Connector If no sensor cable is available, make one according to the following diagram (cable lengt

22 tina52e1-d (2014-02) 3.2.2 D-Sub, 15-pin Connector If no sensor cable is available, make one according to the following diagram (cable length

tina52e1-d (2014-02) 23 4 Operation Put the gauge into operation. If you are using an INFICON con-troller, define the measurement range (→  [1

24 tina52e1-d (2014-02) 4.2 Zeroing the Gauge The gauge is factory calibrated while "standing upright" (→ "Calibration Test Repo

tina52e1-d (2014-02) 25 4.2.1 <ZERO> Adjustment The zero can be adjusted via • the <ZERO> button on the gauge, • the diagnost

26 tina52e1-d (2014-02)  Operate the gauge for at least 90 minutes under constant ambient conditions (until the signal is stable).  Briefly p

tina52e1-d (2014-02) 27 It also permits to adjust an offset of the characteristic curve in order to • compensate for the offset of the measurin

28 tina52e1-d (2014-02) Keep the button depressedmax. ø1.1 mm  Push the <ZERO> button again: Fine adjustment within 0...3 s: the zero

tina52e1-d (2014-02) 29 4.3 Switching Functions The two switching functions can be set to any pressure within the measurement range of the gaug

tina52e1-d (2014-02) 3 Validity This document applies to products of the CDG100D series. Part numbers of standard products are indicated below

30 tina52e1-d (2014-02) 4.3.1 Adjusting the Setpoints The setpoints can be adjusted via • the buttons on the gauge, • the diagnostic port (

tina52e1-d (2014-02) 31 Press the buttonmax. ø1.1 mm  For changing the threshold value, push the <ZERO> button and keep it depressed. T

32 tina52e1-d (2014-02)  Push the <ZERO> button again: Fine adjustment within 0...3 s: the zero adjustment value changes by one unit Cha

tina52e1-d (2014-02) 33 4.5 Diagnostic Port (RS232C Interface) The diagnostic port <DIAG> permits to output the pressure reading and al

34 tina52e1-d (2014-02) 5 Deinstallation Preconditions: • Vacuum system vented • Vacuum system cooled to <50 °C 5.1 Power Connection 

tina52e1-d (2014-02) 35 DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to

36 tina52e1-d (2014-02)  Remove the insulation shell. Insulation shell  Remove the gauge from the vacuum system and install the protective li

tina52e1-d (2014-02) 37 6 Maintenance, Repair Under clean operating conditions, the product requires no main-tenance. Gauge failures due to

38 tina52e1-d (2014-02) 8 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before b

tina52e1-d (2014-02) 39 9 Accessories Ordering number Communication adapter (2 m) 6) 303-333 Further Information  [1] www.inficon.co

4 tina52e1-d (2014-02) If not indicated otherwise in the legends, the illustrations in this document correspond to gauges with D-Sub 15-pin conne

40 tina52e1-d (2014-02)  [5] www.inficon.com Communication Protocol DeviceNet™ CDG100D tira51e1 INFICON AG, LI–9496 Balzers, Liechtenstein  [6

tina52e1-d (2014-02) 41 EC Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provision

42 tina52e1-d (2014-02) Notes

tina52e1-d (2014-02) 43 Notes

LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 Original: German tina52d1-d (2014-02) [email protected] t i na52e1-

tina52e1-d (2014-02) 5 Patents EP 1070239 B1, 1040333 B1 US Patents 6528008, 6591687, 7107855, 7140085 Scope of Delivery 1× gauge CDG100D

6 tina52e1-d (2014-02) Contents Product Identification 2 Validity 3 Intended Use 4 Functional Principle 4 Trademarks 4 Patents 5 Scope of De

tina52e1-d (2014-02) 7 Further Information 39 ETL Certification 40 EC Declaration of Conformity 41 For cross-references within this document

8 tina52e1-d (2014-02) 1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventi

tina52e1-d (2014-02) 9 1.3 General Safety Instructions • Adhere to the applicable regulations and take the necessary precautions for the proce