Inficon TM-400 Thin Film Deposition Monitor Bedienungsanleitung PDF herunterladen (Seite 41)

4 - 7

IPN 178800 Rev. B

TM-350/400 Operating Manual

4.3.7 S16 Switch Settings

4.3.8 DAC Range Settings

For more detail information on the DAC, see section 7.8 on page 7-4.

Table 4-3 S16 Switch Settings

Switch # State Description

1 ON/OFF DAC Rate Range Select Bit 0 (Refer to DAC Table below).

2 ON/OFF DAC Thickness Range Select Bit 0 (Refer to DAC Table below).

3 ON Ignores all negative rate or thickness readings and displays

these values as 0.

OFF Disables above feature.

4 ON The TM-400 can switch to a failed back-up sensor, and still

display an O-fail error.

OFF Disables above feature

5 ON/OFF DAC Rate range Select Bit 1 (Refer to DAC Table below).

6 ON/OFF DAC Thickness range Select Bit 1 (Refer to DAC Table below).

7 ON Allows the source shutter to pulse close for 1 second once the

thickness endpoint is reached.

OFF Disables above feature and uses standard operation

8 ON Disable Sensor #2

OFF Normal dual sensor operation

Table 4-4 DAC Range Settings

DAC Range

Thickness Rate Range

Bit 1

(Switch 36)

Bit 0

(Switch #2)

Bit 1

(Switch #5)

Bit 0

(Switch #1)

OFF OFF OFF OFF 99

OFF ON OFF ON 999

ON OFF ON OFF 5000

ON ON ON ON 9999

1 2 ... 36 37 38 39 40 41 42 43 44 45 46 ... 81 82

Keine Kommentare

Inficon TM-400 Thin Film Deposition Monitor Bedienungsanleitung Seite 41