Inficon TM-400 Thin Film Deposition Monitor Bedienungsanleitung PDF herunterladen (Seite 64)

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IPN 178800 Rev. B

TM-350/400 Operating Manual

Lithium Fluoride LiF 2.64 11.41

Magnesium Mg 1.74 5.48

Magnesium Fluoride MgF

2 3.0 13.86

Magnesium Oxide MgO 3.58 21.48

Manganese Mn 7.20 23.42

Manganese (II) Sulfide MnS 3.99 9.39

Mercury Hg 13.46 11.93

Molybdenum Mo 10.20 34.36

Nickel Ni 8.91 26.68

Niobium Nb 8.57 17.91

Palladium Pd 12.00 24.73

Platinum Pt 21.40 36.04

Potassium Chloride KC 1.98 4.31

Rhenium Re 21.04 58.87

Rhodium Rh 12.41 42.05

Samarium Sm 7.54 9.92

Scandium Sc 3.0 9.70

Selenium Se 4.82 10.22

Silicon Si 2.32 12.40

Silicon (II) Oxide SiO 2.13 10.15

Silicon Dioxide (fused quartz) SiO

2 2.2 8.25

Silver Ag 10.50 16.69

Silver Bromide AgBr 6.47 7.48

Silver Chloride AgCl 5.56 6.69

Sodium Na 0.97 1.84

Sodium Chloride NaCl 2.17 5.62

Strontium Sr 2.620

Sulphur S 2.07 3.86

Tantalum Ta 16.60 33.70

Table 9-2 Density and Acoustic Impedance Values for Selected Materials (continued)

Material Symbol Density

gm/cm^2

Impedance

10^5gm/(cm^2sec)

1 2 ... 59 60 61 62 63 64 65 66 67 68 69 ... 81 82

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Inficon TM-400 Thin Film Deposition Monitor Bedienungsanleitung Seite 64