Inficon TM-400 Thin Film Deposition Monitor Bedienungsanleitung PDF herunterladen (Seite 62)

9 - 4

IPN 178800 Rev. B

TM-350/400 Operating Manual

5 Alternating between the TOOLING FACTOR and the Modify up and Modify

down key, follow the procedure described in step 5 on page 9-3 except the

Modify down key is used to lower the displayed thickness to the actual

thickness and the Modify up key is used to raise the display thickness to actual

thickness. Continue until the displayed thickness agrees with the measured

thickness.

6 The Tooling factor should now be correct for the specific application measured.

9.6.3 Acoustic Impedance

1 Use a heavily loaded sensor crystal with a crystal health of about 75%.

2 Deposit on the sensor crystal until the crystal health approaches 50%.

3 Measure the actual thickness of the deposition.

4 Alternating between ACOUSTIC IMPEDANCE and the Modify up and Modify

down keys, follow the procedure described in step 5 on page 9-3 until the

displayed thickness agrees with the measured thickness. See Table 9-1.

5 This calibrates the acoustic impedance for the material being deposited.

Table 9-1 Calibration Adjustment

THICKNESS MATERIAL

DENSITY

TOOLING

FACTOR

ACOUSTIC

IMPEDANCE

Display is greater than actual Modify up Modify down Modify down

Display is lower than actual Modify down Modify up Modify up

Table 9-2 Density and Acoustic Impedance Values for Selected Materials

Material Symbol Density

gm/cm^2

Impedance

10^5gm/(cm^2sec)

Aluminum Al 2.70 8.17

Aluminum Oxide Al

2O3 3.97 26.28

Antimony Sb 6.62 11.49

Arsenic As 5.73 9.14

Barium Ba 3.5 4.20

Beryllium Be 1.85 16.26

Bismuth Bi 9.8 11.18

Boron B 2.54 22.70

Cadmium Cd 8.64 12.95

Cadmium Sulfide CdS 4.83 8.66

1 2 ... 57 58 59 60 61 62 63 64 65 66 67 ... 81 82

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