Inficon TM-400 Thin Film Deposition Monitor Bedienungsanleitung PDF herunterladen (Seite 58)

8 - 4

IPN 178800 Rev. B

TM-350/400 Operating Manual

8.4 Rate Calculation

The deposition rate is calculated by dividing the change in thickness between

measurements by the time between measurements. The rate is then filtered by a

three pole digital filter to filter out quantizing and sampling noise introduced by the

discrete time, digital nature of the measurement process. The above filter has an

effective time constant of about 2 seconds. Following a step the displayed rate will

settle to 95% of the final value in 5 sec.

1 2 ... 53 54 55 56 57 58 59 60 61 62 63 ... 81 82

TM-350/400 1
10/01/07 5
Warranty 7
Table Of Contents 9
TM-350/400 Operating Manual 10
TOC - 3 11
TM-350/400 Operating Manual 11
TOC - 4 12
Chapter 11 12
Repair and Maintenance 12
Chapter 1 13
1.6 Power Switch 14
1.5 Line Fuses 14
Chapter 2 15
General Description 15
2.3.1 Measurement 17
2.3.2 Display 17
2.3.3 Computer Interfaces 17
2.3.4 Program Parameters 18
2.3.5 Input Capability 18
2.3.6 Output Capability 18
2.3.7 Other 18
Figure 2-1 TM-400 Outline 19
Figure 2-2 TM-400R Outline 20
2.4 Accessories 21
Chapter 3 23
Unpacking and Inspection 23
3.3.1 IEEE-488 Option Board 24
3.3.2 RS-485 Option 25
Figure 3-4 Output Connector 29
Figure 3-5 Input Connector 30
3 - 10 32
3 - 11 33
3 - 12 34
4.1.1 Proper Grounding 35
4.1.2 Heat Dissipation 35
4.2.4 Remote TTL Inputs 36
4.2.5 Relay Outputs 36
4.3 Internal DIP Switches 38
4.3.3 DAC 40
4.3.7 S16 Switch Settings 41
4.3.8 DAC Range Settings 41
4.4 Monitor Cover Removal 42
4 - 10 44
Chapter 5 45
Chapter 6 47
Sensor Crystal Replacement 47
Chapter 7 49
Operation 49
7.5 Crystal Test Display 51
7.6 Crystal Fail Indication 51
7.7 Power Fail Indication 52
7.8 DAC Operation 52
Table 7-2 DAC Range Settings 53
Chapter 8 55
Theory of Operation 55
IPN 178800 Rev. B 56
8.4 Rate Calculation 58
Chapter 9 59
9.4 Density 60
9.5 Acoustic Impedance 60
9.6 Empirical Calibration 61
9.6.3 Acoustic Impedance 62
Chapter 10 67
Computer Interface 67
10.5 Protocol 68
10.6 Data Types 69
10.8 Instruction Summary 70
10 - 5 71
Decimal Pt 72
10 - 7 73
Table 10-6 Status Data 73
10 - 8 74
10 - 9 75
10 - 10 76
11 - 2 78
11.3.2 RAM Failure (I FAIL) 79
11 - 4 80
11 - 5 81
11 - 6 82

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