Inficon TM-400 Thin Film Deposition Monitor Bedienungsanleitung PDF herunterladen (Seite 73)

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IPN 178800 Rev. B

TM-350/400 Operating Manual

5. Send monitor status (Code #4)

Instructs the monitor to send the status data. The description of the status data is

given in Table 10-6.

Example: To instruct the monitor to send the status data the computer would send:

Chr$(255)+Chr$(254)+Chr$(1)+Chr$(4)+Chr$(0)+Chr$(251)

Table 10-6 Status Data

Parameter Name Length (bytes) Range

Active Film # 1 (1-100)

Active Sensor # 1 (1-2)

Sensor #1 Health 1 (0-99 or 255=Failed)

Sensor #2 Health 1 (0-99 or 255=Failed)

Source & Sensor Shutter 1 (Bit6 = Source, Bit7 =

Sensor.

0=Closed,1=Open)

Display # 1 (0=Rate&Thk, 1=Freq,

2=Test)

I/O Address 1 (0-31)

Crystal Type 1 (0=2.5MHz, 1=3.0MHz,

2=5.0MHz, 3=6.0MHz,

4=9.0MHz, 5=10.0MHz)

Simulate Mode 1 (Bit 4, 0=Off, 1=On)

Failure Register 1 Bit0 = Ram Fail Bit1 =

EPROM Fail Bit2 = Film

Data Fail Bit3 = Sensor

Input Fail Bit4 = Not Used

Bit5 = Power Fail Bit6 =

Sensor Card Fail

Total 10 bytes

1 2 ... 68 69 70 71 72 73 74 75 76 77 78 ... 81 82

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Inficon TM-400 Thin Film Deposition Monitor Bedienungsanleitung Seite 73